A micro-inductor with thin film magnetic core for a 20 MHz buck converter

Peng, Shanfeng; Yu, Junchao; Feeney, Ciaran; Ye, Tingcong; Zhang, Zhengmin; Wang, Ningning

doi:10.1016/j.jmmm.2020.167661

Cited by 10 publications

(3 citation statements)

References 34 publications

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“…Figure a compares the performance, inductance density (L/area) vs Q/area, of the S‐RuM power inductors with conventional state‐of‐the‐art (SoA) micro‐inductors with similar sizes, frequencies, and application targets. [ 58–72 ] By this figure of merit, S‐RuM Cu plated inductors achieved very high Q per area due to resistance improvements of over 10x. The Q value of the 2‐cell, 5‐turn S‐RuM inductors (plotted in green) improved from 2 to 15 without changing the physical areal footprint of 0.15 mm 2 , allowing this device design to reach a higher Q per area than all other reported micro‐inductors.…”

Section: Integrated Plating Of Core and Shell In S‐rum Inductorsmentioning

confidence: 99%

“…Benchmark of S‐RuM electroplated inductors with conventional state‐of‐the‐art (SoA) inductors. a) Benchmark chart of L/area vs Q/area for three types of S‐RuM inductors against other SoA micro‐inductors recently reported in the literature: [ 58–72 ] (green) 2‐cell, 5‐turn, Cu plated devices; (yellow) 4‐cell, 15‐turn, Cu plated devices; (red) 4‐cell, 10‐turn, Cu shell and magnetic core plated devices (circle for control/unplated, star for plated). b) Comparison of S‐RuM devices of the same geometries with and without electroplating: (green) 2‐cell, 5‐turn, Cu plated devices showing significant resistance drop; (yellow) 4‐cell, 15‐turn, Cu plated devices showing significant resistance drop; (red) 4‐cell, 5‐turn, and (blue) 4‐cell 10‐turn, Cu shell and magnetic core plated devices, showing both significant resistance drops and inductance increases (circle for control/unplated, triangle for plated).…”

Section: Integrated Plating Of Core and Shell In S‐rum Inductorsmentioning

confidence: 99%

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Unleashing the Performance of Self‐Rolled‐Up 3D Inductors via Deterministic Electroplating on Cylindrical Surfaces

Yang,

Khandelwal,

Wang

et al. 2024

Adv Materials Technologies

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Internet‐of‐Things and Cyber‐Physical‐System applications demand compact power converters, which require inductors to have small footprints but considerable power handling abilities. 3D air‐core tubular inductors fabricated using the self‐rolled‐up membrane (S‐RuM) technology have demonstrated significantly higher inductance density compared to conventional planar structures. However, previous design options and associated performance are constrained by the resistive loss due to the thickness of the metal and magnetic coupling limited by the air core. Here, the study reports a post‐rolling electroplating scheme aimed at enhancing the metal conductivity and core magnetic permeability in S‐RuM inductors, all while maintaining their compact footprint. A DC resistance improvement of over 10X and an inductance enhancement of over 30X are achieved by the 3D S‐RuM inductors, via parallel‐processed Cu‐electroplated strips on the cylindrical shells and partially permalloy‐electroplated core. The improvement is projected to continue to improve as the entire core is filled. This advancement paves the way for scalable applications of this technology in ultra‐compact, low‐loss passive power electronics, such as converters and filters.

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Section: Integrated Plating Of Core and Shell In S‐rum Inductorsmentioning

confidence: 99%

Section: Integrated Plating Of Core and Shell In S‐rum Inductorsmentioning

confidence: 99%

Unleashing the Performance of Self‐Rolled‐Up 3D Inductors via Deterministic Electroplating on Cylindrical Surfaces

Yang,

Khandelwal,

Wang

et al. 2024

Adv Materials Technologies

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“…The flexible inductors are compared with the air-core planar inductors [34,35] and typical magnetic thin film inductors such as NiFe, [36,37] FeHfN, [38] FeTaN, [39] NiZnCuFeO, [40,41] NiZn, [42] and CoZrO. [43] Table 1 enumerates the materials, dimensions, inductance values, and inductance densities of inductors both from existing literature and those fabricated in this study.…”

Section: Performance Of Flexible Mini-inductorsmentioning

confidence: 99%

Flexible Mini‐Inductors with Ultra‐High Inductance Density Directly Cut from Soft Magnetic Amorphous Alloys by Femtosecond Laser

Chen,

Zhang,

Wang

et al. 2024

Adv Funct Materials

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Inductors are indispensable parts in power modules of electronic devices. With the rapid development of flexible and wearable electronic devices, developing flexible micro‐inductors with large energy storage has become an urgent task. In this research, a sophisticated femtosecond laser ablation technique is employed to craft circular spiral mini‐inductors via selective etching of soft magnetic amorphous alloy ribbons. Remarkably, while these inductors possess dimensions akin to human fingerprints, they demonstrate an impressively elevated inductance value of ≈1.15 µH at 1 MHz. The inductance density is ≈280–390 nH mm−2, which is ≈10 times larger than conventional circular spiral inductors and is attributed to the high permeability of the amorphous alloys. Furthermore, the inductors showcase commendable flexibility, marked by stellar elasticity and a bending endurance exceeding 2500 cycles, thanks to the amorphous alloys' superior elastic strain limit. When integrated with an LM2576‐3.3BT buck converter, the fabricated inductor achieved a peak power conversion efficiency nearing 70%. These findings underscore the potential of such flexible mini‐inductors in the landscape of flexible electronics.

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Magnetic property regulation and mechanism analysis of FeSiBC soft magnetic composites by mixing with FeSiCr or carbonyl iron powder

Zhu,

Wang,

Liu

et al. 2023

Journal of Magnetism and Magnetic Materials

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A micro-inductor with thin film magnetic core for a 20 MHz buck converter

Cited by 10 publications

References 34 publications

Unleashing the Performance of Self‐Rolled‐Up 3D Inductors via Deterministic Electroplating on Cylindrical Surfaces

Unleashing the Performance of Self‐Rolled‐Up 3D Inductors via Deterministic Electroplating on Cylindrical Surfaces

Flexible Mini‐Inductors with Ultra‐High Inductance Density Directly Cut from Soft Magnetic Amorphous Alloys by Femtosecond Laser

Magnetic property regulation and mechanism analysis of FeSiBC soft magnetic composites by mixing with FeSiCr or carbonyl iron powder

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