2013
DOI: 10.1063/1.4807598
|View full text |Cite
|
Sign up to set email alerts
|

Abstract: A time-domain thermoreflectance imaging methodology with pulsed laser illumination is developed to achieve nanosecond time resolution with diffraction limited spatial resolution. Validation of the proposed methodology through a transient temperature measurement of a micro gold resistor under ∼110 ns pulsed heating is demonstrated, which shows consistency with the corresponding numerical simulation. This approach allows us to determine the transient energy transport in miniature structures, such as microelectro… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
1
0

Year Published

2014
2014
2020
2020

Publication Types

Select...
5

Relationship

0
5

Authors

Journals

citations
Cited by 8 publications
(1 citation statement)
references
References 22 publications
0
1
0
Order By: Relevance
“…[18][19][20] For the detection of hot spots in microelectronic devices, TTR became a powerful tool which allows for a complete 2D-imaging of transient temperature fields of a microchip in operation. [21][22][23][24] In this letter we present an alternative, complementary method to determine the transient laser-induced temperature by probing the effect of transient thermal lattice expansion. Since this method relies on X-ray diffraction, the underlying atomic-scale structure is directly probed and it delivers information from the surface and buried near-surface region.…”
mentioning
confidence: 99%
“…[18][19][20] For the detection of hot spots in microelectronic devices, TTR became a powerful tool which allows for a complete 2D-imaging of transient temperature fields of a microchip in operation. [21][22][23][24] In this letter we present an alternative, complementary method to determine the transient laser-induced temperature by probing the effect of transient thermal lattice expansion. Since this method relies on X-ray diffraction, the underlying atomic-scale structure is directly probed and it delivers information from the surface and buried near-surface region.…”
mentioning
confidence: 99%