A methodology and model for the pull-in parameters of electrostatic actuators

Abstract

This paper presents a generalized model for the pull-in phenomenon in electrostatic actuators with a single input, either charge or voltage. The pull-in phenomenon of a general electrostatic actuator with a single input is represented by an algebraic equation referred to as the pull-in equation. This equation directly yields the pull-in parameters, namely, the pull-in voltage or pull-in charge and the pull-in displacement. The model presented here permits the analysis of a wide range of cases, including nonlinear mechanical effects as well as various nonlinear, nonideal, and parasitic electrical effects. In some of the cases, an analytic solution is derived, which provides physical insight into how the pull-in parameters depend upon the design and properties of the actuator. The pull-in equation can also yield rapid numerical solutions, allowing interactive and optimal design. The model is then utilized to analyze analytically the case of a Duffing spring, previously analyzed numerically by Hung and Senturia, and captures the variations of the pull-in parameters in the continuum between a perfectly linear spring and a cubic spring. Several other case studies are described and analyzed using the pull-in equation, including parallel-plate and tiltedplate (torsion) actuators taking into account the fringing field capacitance, feedback and parasitic capacitance, trapped charges, an external force, and large displacements. [655]

Approche éducative de la simulation des microsystèmes dans leur environnement

“…A cette valeur, nommée par la suite V Pin , on observe une attraction du miroir jusqu'au contact avec le premier obstacle sur sa trajectoire. Cette valeur spéciale de la tension est appelée tension de « pull-in » [11]. L'angle θ pin correspondant est donné par : En combinant le fichier contenant la vue bi-dimensionnelle de la structure avec le processus technologique, on obtient une vue 3D de la structure, selon le processus décrit en figure 7.…”

A Characteristic Study of Micromirror with Sidewall Electrodes

“…There are reports on the determination of pull-in voltage of a 1-D micromirror under electrostatic force (Chen et al 2004;Degani et al 1998;Nemirovsky and Degani 2001). Xiao et al (2002) presented a method of calculating 2-D micromirror pull-in voltage.…”

Self-affine roughness influence on the pull-in voltage in capacitive electromechanical devices

“…Electrically supported microstructures become unstable under a nonlinear electrostatic force beyond an applied voltage, which is called the pull-in voltage. [1][2][3][4] A capacitive microelectromechanical system ͑MEMS͒ has been proposed for use as a dc voltage transfer standard in metrology. [1][2][3][4][5] In any case, the pull-in voltage depends only on a spring constant and geometrical properties.…”