A Method for Precision Patterning of Silicone Elastomer and Its Applications

Ryu, Kee Suk; Wang, Xuefeng; Shaikh, Kashan; Liu, Chang

doi:10.1109/jmems.2004.832188

Cited by 60 publications

(42 citation statements)

References 19 publications

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“…PDMS provides excellent and proven biocompatibility. [55] It can be processed by cast molding, spin coating, screen printing, [56] or drilling. Since many of these processes do not require photolithography, PDMS processing is widely used among biologists and chemists.…”

Section: Polymer Mems Devicesmentioning

confidence: 99%

“…[62,64] PDMA can be bulk cast, spin cast, or micro patterned by modified screen printing method. [56] When spin casting, the thickness can be controlled by the spin speed and the viscosity of PDMS precursors. Due to finite viscosity, the thickness resulting from spin casting is generally on the order of tens of lm.…”

Section: Polymer Mems Devicesmentioning

confidence: 99%

“…For example, PDMS with expandable micro spheres have been used for actuation. [80] Nanocomposite elastomers can be patterned using precision screen printing technology [56] and then integrated with nonconductive elastomers in multilayer soft lithography processes to form functional soft MEMS devices. Conductive elastomer structures can also form capacitors for both sensing and actuation.…”

Section: Polymer Mems Devicesmentioning

confidence: 99%

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Recent Developments in Polymer MEMS

2007

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Polymer materials, including elastomers, plastics and fibers, are being actively used for MEMS sensors and actuators. Polymer materials provide many advantages in terms of cost, mechanical properties, and ease of processing. In addition, polymers are being investigated for displays, memory, and circuitry. However, the incorporation of polymers for structural or functional purposes in MEMS systems raises new issues and challenges. This article provides a comprehensive review of the recent state of the art of polymer based MEMS—including materials, fabrication processes, and representative devices, including microfluidic valves and tactile sensors. Frequently used materials are reviewed, including polydimethylsiloxane (PDMS), parylene, nanocomposite elastomers, and SU‐8 epoxy.

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Section: Polymer Mems Devicesmentioning

confidence: 99%

Section: Polymer Mems Devicesmentioning

confidence: 99%

Section: Polymer Mems Devicesmentioning

confidence: 99%

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Recent Developments in Polymer MEMS

2007

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“…To pattern waveguides in PDMS, a widely adopted approach is to precisely fill microchannels using a razor blade or squeegee [18,[20][21][22]. Hereby, the challenge is to remove the excess material to avoid a residual layer between the different waveguide cores since this may cause cross-talk between neighboring channels.…”

Section: Introductionmentioning

confidence: 99%

Stretchable optical waveguides

Missinne¹,

Kalathimekkad²,

Hoe³

et al. 2014

Opt. Express

100

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Abstract:We introduce the concept of mechanically stretchable optical waveguides. The technology to fabricate these waveguides is based on a cost-efficient replication method, employing commercially available polydimethylsiloxane (PDMS) materials. Furthermore, VCSELs (λ = 850 nm) and photodiodes, embedded in a flexible package, were integrated with the waveguides to obtain a truly bendable, stretchable and mechanically deformable optical link. Since these sources and detectors were integrated, it was possible to determine the influence of bending and stretching on the waveguide performance. Appl. Phys. Lett. 85, 3435-3437 (2004). 7. J. A. Rogers, T. Someya, and Y. Huang, "Materials and mechanics for stretchable electronics," Science 327, 1603Science 327, -1607Science 327, (2010. 8. T. Sekitani, Y. Noguchi, K. Hata, T. Fukushima, T. Aida, and T. Someya, "A rubberlike stretchable active matrix using elastic conductors," Science 321, 1468Science 321, -1472Science 321, (2008. 9. D. Pham, H. Subbaraman, M. Chen, X. Xu, and R. Chen, "Self-aligned carbon nanotube thin-film transistors on flexible substrates with novel source -drain contact and multilayer metal interconnection," IEEE Trans. Nanotechnol. 11, 44-50 (2012).

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“…13 We have also developed a multilayered modular microfluid architecture 14 for low-cost rapid prototyping of custom microfluid systems.…”

Section: Introductionmentioning

confidence: 99%