A Linear Inchworm Piezomotor with a New Configuration: Design Considerations, Fabrication and Characterization

Sangchap, Mohammad; Tahmasebipour, Mohammad; Tahmasebipour, Younes

doi:10.1007/s40997-020-00409-x

Cited by 17 publications

(10 citation statements)

References 15 publications

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“…Generally, the quasi-static piezoelectric motor is excited by a non-sinusoidal voltage signal with low amplitude and frequency. Moreover, the slider is driven by the non-sinusoidal motion of the stator to achieve continuous linear or rotary output, which can achieve a high-resolution driving, but the speed is low [11][12][13][14]. Generating a non-sinusoidal vibration under the excitation of a high-frequency voltage signal is difficult for the stator.…”

Section: Introductionmentioning

confidence: 99%

Design, simulation, and motion characteristics of a novel impact piezoelectric actuator using double stators

Qing¹,

Mingfei²,

Wang³

et al. 2022

Smart Mater. Struct.

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This study presents a novel impact piezoelectric motor that excites double stators through a sinusoidal signal. A sawtooth signal drives the traditional impact piezoelectric actuator, and its working frequency is limited by the resonant frequency. This study uses sine signals to drive the double stators to produce a sinusoidal vibration. The sinusoidal vibration of different frequencies and amplitudes are synthesised into a sawtooth vibration on the stage plate. The directional movement of the slider is realised using the vibration of the stage plate to drive the slider. This structure reduces the space required for the piezoelectric actuator to work. The working principle of the motor is discussed, and the structure is constructed. The dynamics model of the whole system is established on the based of the dynamics model of the actuator and the LuGre friction model. Moreover, the dynamics model was simulated and analysed through MATLAB/Simulink. The prototype is fabricated and tested. Experimental results confirm the effectiveness of using sinusoidal signals to drive the piezoelectric actuator, and the motion process of the piezoelectric motor is consistent with the theoretical analysis. The maximum speed of the piezoelectric actuator is 5.54 mm/s, and the resolution is 0.72 μm. This study provides an effective driving method for the quasi-static piezoelectric motor to improve the working frequency.

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Section: Introductionmentioning

confidence: 99%

Design, simulation, and motion characteristics of a novel impact piezoelectric actuator using double stators

Qing¹,

Mingfei²,

Wang³

et al. 2022

Smart Mater. Struct.

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show abstract

“…The resolution was 60 nm, and the highest speed was only 1.259 mm s −1 . Sangchap et al [6] designed an integrated two-axis inchworm piezoelectric motor with a working frequency of 150 Hz. The resolution was 81 nm and the speed was 1.075 mm s −1 .…”

Section: Introductionmentioning

confidence: 99%

Development of a high-resolution, high-speed impact piezoelectric actuator using cross-frequency band method

Li¹,

Li²,

Mingfei³

et al. 2022

Smart Mater. Struct.

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A novel impact piezoelectric actuator is proposed in this paper to achieve cross-scale driving, which can realise high resolution and high speed. The piezoelectric actuator is mainly composed of four diamond-shaped flexible hinges, which can consider a certain stiffness and flexibility. The operating principle of the piezoelectric actuator is introduced. The actuator is excited by two sinusoidal waves with a frequency ratio of 1:2 to achieve impact drive at quasi static state. The appropriate structural parameters are obtained by simulation. The actuator is designed to make the frequency ratio of first and second vibration modes 1:2, which can achieve impact drive at resonant state. The prototype is fabricated, and the characteristics are tested. The measured resonant frequency ratio is consistent with the simulated value. Experimental results show that when the prototype works at quasi-static state, the resolution is 37 nm with driving voltages of 12 Vp-p; at resonant state, the no-load maximum speed is 125.43 mm/s and the maximum load is 0.5 N when the driving frequency and voltages are 1.95 kHz, 40 Vp-p and 3.90 kHz, 160 Vp-p, respectively. The proposed actuator can be used for precision positioning and can improve the accuracy and the efficiency of processing instruments.

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“…Inchworm actuators have high thrust and high resolution [ 26 , 27 , 28 ], and utilizing the inchworm principle increases the stroke by accumulating paces of the actuator and can obtain very high resolution within one pace [ 29 , 30 ]. In the existing research on inchworm actuators [ 31 , 32 ], the way to realize clamping and release mainly depends on the deformation of laminated piezoelectric ceramics or the deformation of mechanical amplification mechanism actuated by laminated piezoelectric ceramics.…”

Section: Introductionmentioning

confidence: 99%

Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

2022

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In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached to major clamping feet. Its construction was introduced and its operating principle was analyzed. Structure design details were discussed and a prototype was proposed. The prototype was fabricated and tested. The experimental results show that the proposed actuator can operate stably along a 20 mm guider. The proposed design is suitable for precision motion control applications.

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A Linear Inchworm Piezomotor with a New Configuration: Design Considerations, Fabrication and Characterization

Cited by 17 publications

References 15 publications

Design, simulation, and motion characteristics of a novel impact piezoelectric actuator using double stators

Design, simulation, and motion characteristics of a novel impact piezoelectric actuator using double stators

Development of a high-resolution, high-speed impact piezoelectric actuator using cross-frequency band method

Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station

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