A general protocol for the reconstruction of 3D atom probe data

Bas, Pierre‐Yves Le; Bostel, A.; Déconihout, B.; Blavette, D.

doi:10.1016/0169-4332(94)00561-3

Cited by 402 publications

(311 citation statements)

References 6 publications

Supporting

Mentioning

298

Contrasting

Unclassified

Order By: Relevance

“…The specimens were measured in laser pulsing mode (532 nm wavelength) with a repetition rate of 160 kHz, a base temperature of 60-65 K and laser pulse energy of 0.5 nJ. The data were reconstructed using the standard algorithm developed by Bas et al [46] and analyzed with the software CAMECA TM IVAS 3.6.8.…”

Section: Methodsmentioning

confidence: 99%

Phase separation of a supersaturated nanocrystalline Cu–Co alloy and its influence on thermal stability

et al. 2015

View full text Add to dashboard Cite

The thermal decomposition behavior, the microstructural evolution and its influence on the mechanical properties of a supersaturated Cu-Co solid solution with ~100 nm average grain size prepared by severe plastic deformation is investigated under non-isothermal and isothermal annealing conditions. Pure fine-grained Cu and Co exhibit substantial grain growth upon annealing, whereas the Cu-Co alloy is thermally stable at the same annealing temperatures. The annealed microstructures are studied by independent characterization methods, including scanning electron microscopy, electron energy loss spectroscopy and atom probe tomography. The phase separation process in the Cu-Co alloy proceeds by the same mechanism, but on different length scales: a fine scaled spinodal-type decomposition is observed in the grain interior, simultaneously Co and Cu regions with a larger scale are formed near the grain boundary regions. Subsequent grain growth at higher annealing temperatures results in a microstructure consisting of the pure equilibrium phases. Such mechanisms can be used to tailor nano structures to optimize certain properties. Published in

show abstract

Section: Methodsmentioning

confidence: 99%

Phase separation of a supersaturated nanocrystalline Cu–Co alloy and its influence on thermal stability

et al. 2015

View full text Add to dashboard Cite

show abstract

“…Further shaping was carried out by field evaporation in the atom probe microscope (LEAP 3000X SI, Imago Scientific Instruments). Copper coatings were deposited successfully when the tip radius, as estimated from the stopping voltage during field evaporation, 22 was greater than 65 nm. In galvanic deposition experiments, the Al tips were first etched for 2 min in 0.1 M Na 2 SO 4 solution at pH 11.75.…”

Section: ■ Experimental Sectionmentioning

confidence: 99%

Atom Probe Tomography Characterization of Thin Copper Layers on Aluminum Deposited by Galvanic Displacement

Zhang

Hillier

et al. 2012

Langmuir

View full text Add to dashboard Cite

Abstract″Ultrathin″ metallization layers on the order of nanometers in thickness are increasingly used in semiconductor interconnects and other nanostructures. Aqueous deposition methods are attractive methods to produce such layers due to their low cost, but formation of ultrathin layers has proven challenging, particularly on oxide-coated substrates. This work focused on the formation of thin copper layers on aluminum, by galvanic displacement from alkaline aqueous solutions. Analysis by atom probe tomography (APT) showed that continuous copper films of approximately 1 nm thickness were formed, apparently the first demonstration of deposition of ultrathin metal layers on oxidized substrates from aqueous solutions. The APT reconstructions indicate that deposited copper replaced a portion of the surface oxide film on aluminum. The results are consistent with mechanisms in which surface hydride species on aluminum mediate deposition, either by directly reducing cupric ions or by inducing electronic conduction in the oxide, thus enabling cupric ion reduction by Al metal. Disciplines Chemical Engineering CommentsReprinted with permission from Langmuir 28 (2012) ABSTRACT: ″Ultrathin″ metallization layers on the order of nanometers in thickness are increasingly used in semiconductor interconnects and other nanostructures. Aqueous deposition methods are attractive methods to produce such layers due to their low cost, but formation of ultrathin layers has proven challenging, particularly on oxide-coated substrates. This work focused on the formation of thin copper layers on aluminum, by galvanic displacement from alkaline aqueous solutions. Analysis by atom probe tomography (APT) showed that continuous copper films of approximately 1 nm thickness were formed, apparently the first demonstration of deposition of ultrathin metal layers on oxidized substrates from aqueous solutions. The APT reconstructions indicate that deposited copper replaced a portion of the surface oxide film on aluminum. The results are consistent with mechanisms in which surface hydride species on aluminum mediate deposition, either by directly reducing cupric ions or by inducing electronic conduction in the oxide, thus enabling cupric ion reduction by Al metal.

show abstract

“…The volume reconstruction methods are based on the fact that the atoms are evaporated atomic layer by atomic layer. Simple geometric considerations are often enough to resolve atomic planes, proving the efficiency of this simple method [4]. In a first approximation, a 3D atom probe can be considered as a point projection microscope.…”

Section: Local Magnification Effect In 3d Atom Probe Analysis Reconstmentioning

confidence: 99%

“…1c), the lateral coordinates correction is not straightforward because of the interdependence between the atoms coordinates ( [4]). To solve this problem, we use an iterative algorithm which homogenizes the volume by superimposing a grid to the 3D atom map, and deforming this grid according to the gradient of atomic density.…”

Section: Local Magnification Effect In 3d Atom Probe Analysis Reconstmentioning

confidence: 99%

An improved reconstruction procedure for the correction of local magnification effects in three‐dimensional atom‐probe

Geuser

Lefebvre

Danoix

et al. 2007

Surface & Interface Analysis

Self Cite

View full text Add to dashboard Cite

A new 3DAP reconstruction procedure is proposed, which accounts for the evaporation field of a secondary phase. It applies the existing cluster selection softwares to identify the atoms of the second phase and subsequently an iterative algorithm to homogenise the volume laterally. This procedure, easily implementable on existing reconstruction software, has been applied successfully on simulated and real 3DAP analyses.

show abstract

A general protocol for the reconstruction of 3D atom probe data

Cited by 402 publications

References 6 publications

Phase separation of a supersaturated nanocrystalline Cu–Co alloy and its influence on thermal stability

Phase separation of a supersaturated nanocrystalline Cu–Co alloy and its influence on thermal stability

Atom Probe Tomography Characterization of Thin Copper Layers on Aluminum Deposited by Galvanic Displacement

An improved reconstruction procedure for the correction of local magnification effects in three‐dimensional atom‐probe

Contact Info

Product

Resources

About