A Flexible Ultrasonic Sensor Based on Piezoelectric Micromachined Ultrasonic Transducers (pMUTs)

Tong, Zhihao; Wu, Zhipeng; Zhang, Songsong; Liu, Huicong; Lou, Liang

doi:10.1109/icept52650.2021.9567942

Cited by 5 publications

(4 citation statements)

References 12 publications

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“…The PMUTs have multiple resonance frequencies. Operating at the first resonant frequency, both the longitudinal resonance displacement amplitude of the center point and the generated surface sound pressure reach their maximum magnitude [16]. Hence, the first resonance frequency is the recommended operational frequency for the PMUTs presented in this study.…”

Section: Device Designmentioning

confidence: 87%

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

Wang,

Ji,

Wang

et al. 2024

J. Micromech. Microeng.

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In this paper, we successfully developed the 24 × 31 piezoelectric micromachined ultrasound transducers (PMUTs) array with 8 inch CMOS compatible processes. Scandium aluminum nitride (ScxAl1−xN) thin film (x = 20%) was used as the piezoelectric material. The PMUTs array was fabricated on 8-inch cavity silicon-on-insulator (CSOI) wafers with the device silicon layer thickness of only 3um and a cavity pitch of 59 μm. The wafer-level electrical test was conducted using inline auto-prober and the yield rate > 90% was achieved across the 8-inch wafer. The following acoustic test on our PMUTs array (1.5 mm × 2.0 mm) indicated the transmit sensitivity of 18.4 kPa/V @ 10 mm @ 11.6 MHz in oil with −3 dB bandwidth of 2.3 MHz. In order to validate the potential of using PMUTs array for biomedical treatments, subsequent ultrasonic heating experiments were carried out on a silicone block. A temperature rise of 4 ℃ was achievable in about 50 seconds. These results demonstrate that the potential of using PMUTs array as a disposable biomedical device in many therapeutic applications, for example, a treatment for dry eye disease.

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Section: Device Designmentioning

confidence: 87%

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

Wang,

Ji,

Wang

et al. 2024

J. Micromech. Microeng.

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show abstract

“…The critical distance Z g refers to the distance from the sound source of the piston, where a transition from the near field to the far field occurs. This distance can be calculated using Equation (12). At this location and in the near-field region, the sound pressure amplitude is exceptionally high.…”

Section: Methodsmentioning

confidence: 97%

“…This force leads to a change in the distance between the upper and lower electrodes, resulting in a variation in the capacitance value between the electrodes. Consequently, a current that varies with the capacitance value is generated, as indicated in Equation (12). The current is then amplified by trans-resistance and converted into a voltage value.…”

Section: Submerged Environment Acoustic Testing and Characterizationmentioning

confidence: 99%

“…Wang, Z. et al manufactured a 2D CMUT linear array in silicone oil for imaging obstacles [11]. Tong Z. et al fabricated flexible PMUTs to verify the possibility of using flexible ultrasound sensors to sense obstacles in a bent state [12]. S. Sadeghpour et al designed and fabricated three different architectures of PMUTs that are applicable for underwater imaging [13].…”

Section: Introductionmentioning

confidence: 99%

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Investigation of Submerged MEMS Ultrasonic Sensors for Underwater Obstacle Avoidance Application

Wang,

Zhang,

Wang

et al. 2024

Remote Sensing

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Ultrasound is a powerful and versatile technology that has been applied extensively in medicine and scientific research. The development of miniature underwater robots focuses on achieving specific tasks, such as surveys and inspections in confined spaces. However, traditional sonar has limited use in micro underwater robots due to its large size and heavy power demands. Conversely, capacitive micromechanical ultrasonic transducers (CMUTs) offer various advantages, including a wide bandwidth, compact size, and integration feasibility. These attributes make CMUTs a candidate for obstacle avoidance in micro underwater robots. Hence, a novel CMUT structure using Si-Si bonding is proposed. In this design, a membrane isolation layer replaces the cavity bottom isolation layer, simplifying the process and improving bond reliability. A finite element model of the CMUT was constructed in COMSOL and numerically assessed for the CMUT’s operating frequency, collapse voltage, and submerged depth. The CMUT, manufactured using micro-electro-mechanical system (MEMS) technology, undergoes waterproofing with PDMS—A material with similar acoustic impedance to water and corrosion resistance. Underwater tests reveal the CMUT’s resonant frequency in water as approximately 2 MHz, with a −3 dB bandwidth of 108.7%, a transmit/receive beam width of 7.3°, and a standard deviation of measured distance from the true distance of less than 0.05. These outcomes suggest that CMUTs hold promise in obstacle avoidance applications for fish-shaped underwater robots.

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Service Provisioning Using Algorithm of Structure Stability in Virtualized Data Center Based Оn Cloud Technology

Holyaka,

Brych,

Adamiak

et al. 2024

ICTEE

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The informative signal of the vast majority of sensors on piezoelectric transducers is the ToF (Time-of-Flight) of ultrasonic oscillations, and its formation is realized by measuring the delay between the pulses of oscillations emitted by the actuator and the pulses of these oscillations received by the sensor. However, the processes of forming this informative signal and the electronic means of implementing these processes are characterized by a significant influence of extraneous factors, the compensation of which is largely problematic. Following this problem, this work solves the problem of embedded self-diagnosis of piezoelectric sensors signal converters. Methods of intellectualization of measurement processes are used based on the redundancy theory and its further development in the field of redundancy information theory, measuring technology, and sensors. It is proposed to supplement the input signal path of the sensor device with a specialized circuit for activating self-oscillations of the piezoelectric transducer. The proposed method is based on the monitoring of transient processes and oscillations at the frequency of natural oscillations of piezoelectric transducers during periodic switching of the latter to the input of the transimpedance amplifier TIA. In accordance with the proposed solution, the transimpedance amplifier is used to form damping self-oscillations, the frequency, amplitude and decay rate of which are monitored by the drift of the parameters of the piezoelectric transducer. The task of optimizing the operation modes of the circuit unit based on the transimpedance amplifier based on the criterion of maximum efficiency in the formation of an informative signal of the stability of the operation of piezoelectric transducers has been solved. The signal path of the built-in system of ultrasonic piezoelectric sensors with the self-diagnosis function UCQD (U-sound Front-end with in-situ CQ Diagnostic) is implemented using a programmable system on a PSoC (Programmable System on Chip) PSoC 5LP series (Cypres, Infineon Technologies).

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A Flexible Ultrasonic Sensor Based on Piezoelectric Micromachined Ultrasonic Transducers (pMUTs)

Cited by 5 publications

References 12 publications

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment

Investigation of Submerged MEMS Ultrasonic Sensors for Underwater Obstacle Avoidance Application

Service Provisioning Using Algorithm of Structure Stability in Virtualized Data Center Based Оn Cloud Technology

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