Abstract:This article introduces a thin-film thermocouple temperature sensor with symmetrical electrode structure. It uses PI film as a flexible substrate. Cu film and CuNi film made by MEMS manufacturing process as positive and negative electrodes. The device itself has the advantages of miniature, bendable and fast response speed. To reduce the film resistance value. Conducting metal film thickness and sputtering substrate temperature optimization experiments. The critical dimensions of Cu/CuNi film are 650nm and 400… Show more
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