A Dual-Axis MOEMS Accelerometer

Taghavi, Majid; Latifi, Hamid; Parsanasab, Gholam-Mohammad; Abedi, Abolfazl; Nikbakht, Hamed; Poorghadiri, Mohammad Hosein

doi:10.1109/jsen.2021.3072333

Cited by 20 publications

(3 citation statements)

References 24 publications

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“…Taghavi et al designed FP cavities between the cross-section of the inertial mass and the ends of the two split fibers in the X and Y direction, respectively, to detect acceleration in both directions, as shown in Figure 8a. [30] Furthermore, they successfully built a closed-loop accelerometer with an array of fixed and movable comb teeth on the chip, as shown in Figure 8d, which improved the sensitivity and bias stability of the accelerometer to 1.16 V g −1 and 40 μg Hz −1/2 . [31] Rahimi et al set up a coarse cavity and a fine cavity between the inertial mass cross-section and the fiber end faces, as shown in Figure 8b.…”

Section: Fabry-perot Accelerometermentioning

confidence: 99%

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Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

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Section: Fabry-perot Accelerometermentioning

confidence: 99%

Section: Classifications Of Optical Interferometric Mems Accelerometermentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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“…The biaxial MOEM accelerometer described in [27] consisted of the proof mass mounted on four L-shaped elastic elements. Two Fabry-Pérot cavities were formed between the transverse cross-sections of the proof mass and the ends of two optical fibers cleaved in perpendicular directions (X, Y).…”

Section: Introductionmentioning

confidence: 99%

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

Barbin,

Nesterenko,

Koleda

et al. 2024

Sensors

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This treatise studies a microoptoelectromechanical accelerometer (MOEMA) with an optical measuring transducer built according to the optical tunneling principle (evanescent coupling). The work discusses the design of the accelerometer’s microelectromechanical sensing element (MSE) and states the requirements for the design to achieve a sensitivity threshold of 1 µg m/s2 at a calculated eigenvalue of the MSE. The studies cover the selection of the dimensions, mass, eigenfrequency and corresponding stiffness of the spring suspension, gravity-induced cross-displacements. The authors propose and experimentally test an optical transducer positioning system represented by a capacitive actuator. This approach allows avoiding the restrictions in the fabrication of the transducer conditioned by the extremely high aspect ratio of deep silicon etching (more than 100). The designed MOEMA is tested on three manufactured prototypes. The experiments show that the sensitivity threshold of the accelerometers is 2 µg. For the dynamic range from minus 0.01 g to plus 0.01 g, the average nonlinearity of the accelerometers’ characteristics ranges from 0.7% to 1.62%. For the maximum dynamic range from minus 0.015 g to plus 0.05 g, the nonlinearity ranges from 2.34% to 2.9%, having the maximum deviation at the edges of the regions. The power gain of the three prototypes of accelerometers varies from 12.321 mW/g to 26.472 mW/g. The results provide broad prospects for the application of the proposed solutions in integrated inertial devices.

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Design and Analysis of a Robust Gyroscope via Grating SPP on Cantilever

Gholinejad,

Abedi

2024

Sens Imaging

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A Dual-Axis MOEMS Accelerometer

Cited by 20 publications

References 24 publications

Optical Interferometric MEMS Accelerometers

Optical Interferometric MEMS Accelerometers

The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer

Design and Analysis of a Robust Gyroscope via Grating SPP on Cantilever

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