“…PEAs generate sub-nanometer-scale displacements [ 12 , 13 , 14 , 15 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ]. CMs transfer displacements or forces without any clearance or friction [ 12 , 13 , 14 , 15 , 19 , 20 , 22 , 24 , 26 , 27 , 28 , 29 ]. PMs enable the end-effector to have a higher motion generation precision and payload ability [ 12 , 13 , 14 , 15 , 19 , 20 , 26 , 27 , 28 ].…”