2015
DOI: 10.1063/1.4913990
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A comparison of ion beam measurements by retarding field energy analyzer and laser induced fluorescence in helicon plasma devices

Abstract: Both Laser-Induced Fluorescence (LIF) and Retarding Field Energy Analyzers (RFEA) have been applied to the investigation of beams formed in inductively coupled helicon plasmas. While the LIF technique provides a direct measurement of the velocity distribution in the plasma, the RFEA measures ion flux as a function of a retarding potential. In this paper, we present a method to compare the two techniques, by converting the LIF velocity distribution to an equivalent of a RFEA measurement. We applied this method … Show more

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Cited by 22 publications
(31 citation statements)
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References 44 publications
(87 reference statements)
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“…The vertical dotted line at z = 55 cm marks the axial position of the probes. The horizontal dashed lines at r = ±7 cm represent the observed width of the beam [29]. This type of ion detachment from magnetic field lines has earlier also been observed by Takahashi et al [18] and Cox et al [20].…”
Section: Resultsmentioning
confidence: 54%
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“…The vertical dotted line at z = 55 cm marks the axial position of the probes. The horizontal dashed lines at r = ±7 cm represent the observed width of the beam [29]. This type of ion detachment from magnetic field lines has earlier also been observed by Takahashi et al [18] and Cox et al [20].…”
Section: Resultsmentioning
confidence: 54%
“…The high-energy electrons seen at ±7 cm correspond to the width of the source and the width of the ion beam, while the high-energy electrons at r = 14 cm corresponds well with a magnetic field line emerging from the edge of the source [29]. We have already seen increased ion densities in this position (Figure 4A), possibly due to ionization from the high-energy electrons.…”
Section: Resultsmentioning
confidence: 62%
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