DOI: 10.1109/plasma.2004.1339977
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Zh.Q. Yao, P. Yang, N. Huang, H. Sun, J. Wang

Abstract: Fluorine addition to a-C (amorphous carbon) thin films offers many advantages and a deeply understanding of the properties of a-C: F thin films is necessary for applications like biomedical implants and biosensor devices. Fluorine doped diamond-like carbon (a-C:F) films with different fluorine content were fabricated on Si wafer by pulsed vacuum arc plasma deposition. Film composition and structure were characterized by X-ray photoelectron spectroscopy (XPS) and Raman scattering spectroscopy. Surface morpholo…

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