DOI: 10.1109/isscc.1979.1156009
View full text
K. Kiuchi, N. Ieda, K. Takeya, T. Baba

Abstract: bit line to a data bus-line. In the 128K ROM, all bit lines and CDLs are precharged. When it is accessed, only one CDL, including the selected bit, in the system i s discharged by 4) Plasma etching of the CVD Si3N4 film and 8 ion -.nology for 128K EB-ROM", 10th Solid State Devices Conf. Arai E., et. al., "Direct Electron-Beam Data Writing Tech-(Tokyo).