A 256 MEMS Membrane Digital Loudspeaker Array Based on PZT Actuators

Casset, F.; Dejaeger, Rémy; Laroche, B; Desloges, B.; Leclère, Quentin; Morisson, R.; Bohard, Y; Goglio, J.P.; Escato, J; Fanget, S.

doi:10.1016/j.proeng.2015.08.563

Cited by 14 publications

(7 citation statements)

References 4 publications

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“…Typically, a speaker array containing 2 n speaker pixels is used in digital sound reconstruction, where n is the bit number, and each pixel contributes a small amount of sound pressure in the system. In 2015, Casset et al implemented digital sound reconstruction with piezoelectric MEMS speaker arrays [ 81 ]. Figure 11 a shows the fabricated speaker array packaged on an electronic board.…”

Section: Development Of Mems Speakersmentioning

confidence: 99%

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Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing extensive attention for potential applications in hearing instruments, portable electronics, and the Internet of Things (IoT). MEMS speakers based on different transduction mechanisms, including piezoelectric, electrodynamic, electrostatic, and thermoacoustic actuation, have been developed and significant progresses have been made in commercialization in the last few years. In this article, the principle and modeling of each MEMS speaker type is briefly introduced first. Then, the development of MEMS speakers is reviewed with key specifications of state-of-the-art MEMS speakers summarized. The advantages and challenges of all four types of MEMS speakers are compared and discussed. New approaches to improve sound pressure levels (SPLs) of MEMS speakers are also proposed. Finally, the remaining challenges and outlook of MEMS speakers are given.

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Section: Development Of Mems Speakersmentioning

confidence: 99%

“… Schematic and optical images of piezoelectric MEMS speaker arrays: ( a ) a 256-speaker array packaged on an electronic board (Reproduced with permission from Elsevier [ 81 ]) and ( b ) part of a 1024-speaker array (Reproduced with permission from IEEE [ 82 ]). …”

Section: Figurementioning

confidence: 99%

Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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“…MEMS μSpeaker approaches rely on the piezoelectric transduction mechanism [1][2][3][4][5][6][7][8] , the electrostatic transduction mechanism [9][10][11][12][13][14][15] , the magnetic transduction mechanism [16][17][18][19][20] and the thermoacoustic transduction mechanism 21,22 . A thorough review paper about micro speakers was recently published by Wang et al 23 .…”

Section: Introductionmentioning

confidence: 99%

The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers

et al. 2022

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Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitance and because they can be fabricated from materials that are compatible with standard complementary metal-oxide semiconductor (CMOS) technology. For high audio performance and in particular low harmonic distortion (THD) the implementation of the push-pull principle provides strong benefits. With an arrangement of three electrodes in a conjunct moving configuration on a beam, we demonstrate here for the first time a balanced bending actuator incarnating the push-pull principle operating at low voltages. Our first design already exhibits a harmonic distortion as low as 1.2% at 79 dB using a signal voltage of only 6 Vp and a constant voltage of only ±10 Vdc in a standard acoustic measurement setup. Thus, exceeding our previously reported approach in all three key performance indications at the same time. We expect that our novel electrode configurations will stimulate innovative electrostatic actuator developments for a broad range of applications. In this paper we report the basic theory, the fabrication and the performance of our novel actuator design acting as an audio transducer.

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“…Manufacturing such systems is difficult, but planar technologies such as thin film or even thick film are candidates as it is suitable for making numerous, small and identical structures. For example, Dejaeger et al and Casset et al [2] [3]. developed a DLA with 256 Lead Zirconate Titanate (PZT) -based speaklets.…”

Section: Introductionmentioning

confidence: 99%

A study of efficient speaklet driving mechanisms for use in a digital loudspeaker array based on PZT actuators

Monkronthong

White

Harris

2016

2016 IEEE Sensors Applications Symposium (SAS)

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Abstract-The concept of a Digital Loudspeaker Array (DLA) requires a driving signal for a speaklet (tiny loudspeaker) with a short rectangle pulse. The speaklet takes the form of a diaphragm, which vibrates freely and emits acoustic energy at its resonant frequency. This study gives a guideline for the design of PZT speaklets for assigning the required resonant frequency and maximizing the amplitude of the acoustic response. The speaklet consists of three layers; a diaphragm, an active PZT layer, and a bottom electrode. The device is simulated with Comsol Multiphysics. From the simulation, the first resonant frequency mainly depends on diaphragm diameter and thickness while the maximum displacement is related to thickness of the three layer structure. Additionally, this study verifies the concept of a multiple-level DLA that can produce an acoustic signal with a linear relationship between its amplitude and the driving pulse width. This result allows a more flexible design of DLA as the limitation of one bit of resolution per speaklet is removed, allowing designs with a reduced number of speaklets.

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A 256 MEMS Membrane Digital Loudspeaker Array Based on PZT Actuators

Cited by 14 publications

References 4 publications

Review of Recent Development of MEMS Speakers

Review of Recent Development of MEMS Speakers

The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers

A study of efficient speaklet driving mechanisms for use in a digital loudspeaker array based on PZT actuators

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