A SI MONOLITHIC IR-CCD with Schottky-barrier (SB) detectors has been reported to be most suitable for fabricating large scale infrared image sensors'-'. In this paper, a large scale Simonolithic IR-CCD with 65536 (256x256) pixels will be desscribed. The detector is a PtSijP-Si SB diode. To fabricate such a large scale IR-CCD, the three-level polysilicon gate structure and minimum design rules of 29 were applied. The array has resolution sufficient for practical use, and good thermal images were obtained witho…
scite is a Brooklyn-based startup that helps researchers better discover and evaluate scientific articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by researchers from dozens of countries and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.