9.5 % Scandium Doped ALN PMUT Compatible with Pre-Processed CMOS Substrates

Ledesma, Eyglis; Zamora, Iván; Uranga, A.; Barniol, N.

doi:10.1109/mems51782.2021.9375359

Cited by 14 publications

(4 citation statements)

References 9 publications

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“…To validate the proposed MFPW algorithm for ultrasound distance measurements in liquid, an 80 µm squared piezoelectric micromachined ultrasonic transducer (PMUT), fabricated with the MEMS-on-CMOS process from Silterra was used [ 16 , 17 ]. In this case the PMUT is composed of 1.2 μm AlScN (Aluminium Nitride doped with 9.5 % Scandium) sandwiched between aluminum electrodes and covered by 1.5 μm Silicon Nitride as elastic layer [ 18 ]. The PMUT was wire bonded to a printed circuit board (PCB) and immersed in Fluorinert (FC-70).…”

Section: Resultsmentioning

confidence: 99%

“…Considering that the acoustic pressure distribution in far-field of the used PMUT presents an exponential dependence with the distance (2.66/z Pa pp ) [ 18 ], being z the axial distance, the rms voltage at the output of Hydrophone’s preamplifier (V a,rms ) is given by:

where M is the reception sensitivity at the output of hydrophone’s preamplifier (11.22 μV/Pa) [ 21 ]. In our case, the measured amplitudes are inside a range from 4.2 (corresponding to the reference point located at 2.5 mm) to 3 mV rms (3.5 mm).…”

Section: Resultsmentioning

confidence: 99%

“…Considering that the acoustic pressure distribution in far-field of the used PMUT presents an exponential dependence with the distance (2.66/z Pa pp ) [18], being z the axial distance, the rms voltage at the output of Hydrophone's preamplifier (V a,rms ) is given by:…”

Section: Uncertainty Analysismentioning

confidence: 99%

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High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation

Zamora

Ledesma

Uranga

et al. 2021

Sensors

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Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

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High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation

Zamora

Ledesma

Uranga

et al. 2021

Sensors

Self Cite

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“…This is due to the film's significantly lower dielectric permittivity, despite its smaller piezoelectric coefficients, as compared to other piezoelectrics like PZT [11]. The use of Scandium doping in the piezoelectric layer of PMUTs has also been proven to offer improved performance, in terms of sensitivity, as compared to identical devices based on pure AlN [12], [13].…”

Section: Introductionmentioning

confidence: 99%

Scandium-Doped Aluminum Nitride PMUT Arrays for Wireless Ultrasonic Powering of Implantables

Herrera

Simeoni

Giribaldi

et al. 2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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The present work reports on the novel usage of Scandium-doped Aluminum Nitride (AlScN) PMUT arrays for enhanced power transfer in implantable applications. Optimization considerations were explored for the PMUT array towards high performance. The transmission metric, compared to identical arrays based on Aluminum Nitride (AlN), showed a 25dB increase. Power transfer measurements also confirmed a considerable increase as compared to previous work based on AlN. Different matching strategies were explored to maximize the output power including inductor conjugate matching and matching utilizing resonators in series and parallel topologies. A full characterization of the transferred power versus incident acoustic intensity on the array revealed transmission of power levels of several milliwatts for intensities below the Food and Drug Administration's (FDA) limit. The performance of the array, as compared with other implementations with a range of frequencies, dimensions and input acoustic intensities was bench-marked through the use of the conversion efficiency as the figure-of-merit. The practical applicability of the system, utilizing a realistic tissue phantom as the medium, was proven by interfacing with a commercially available boost converter to obtain a rectified voltage and power levels sufficient for powering and charging intra-body electronics.

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A transceiver integrated piezoelectric micromachined ultrasound transducer array for underwater imaging

Yao

Jia

Liu

et al. 2023

Sensors and Actuators A: Physical

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9.5 % Scandium Doped ALN PMUT Compatible with Pre-Processed CMOS Substrates

Cited by 14 publications

References 9 publications

High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation

High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation

Scandium-Doped Aluminum Nitride PMUT Arrays for Wireless Ultrasonic Powering of Implantables

A transceiver integrated piezoelectric micromachined ultrasound transducer array for underwater imaging

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