7‐3: High ESD Robustness and Low Visible Light Reflectance Design for LTPS‐TFTs on Glass Substrates in Modular Micro‐LED Displays

Abstract

Low-temperature poly-silicon thin-film transistors (LTPS-TFTs) on glass substrates in modular micro-LED displays have metal electrodes which are externally exposed to connect LED chips and pads. This structure increases the risk of electrostatic discharge (ESD) from the external environment. Furthermore, glass substrates cause high visible light reflectance. To improve the ESD robustness and reduce visible light reflectance, a backplane structure with a black fine metal mesh is proposed. Modular micro-LED displays with the proposed structure achieved the ESD tolerance higher than 8kV through the standard system-level ESD test and reduced the average visible light reflectance by more than 80%.

29‐1:Invited Paper:Emitters for Flat Panel microLED Displays

“…As such, the light trap of this work is useful for contrast enhancing coverglass. Metal overlays can also add robustness against electrostatic discharge [5]. Fig.…”

“…Brighter, more power efficient devices with better picture quality is the promise of microLED technology [1][2][3][4][5][6][7][8]. Realizing costeffective microLED displays requires integration of varied processes on semiconductor wafers and display substrates, including fabrication, assembly, and interconnection of tiny components.…”

“…Also important are the designs and configurations of microLEDs that facilitate display fabrication, including multicolor emitters [4,[6][7][8][9][10][11][12][13][14] and emitters joined to drivers in microscale packages [1,[6][7][8][9][10][11]. Furthermore, as the manufacturing processes of microLED displays reach maturity, development intensifies in electrical architectures [4,14,15] and optical structures [5,[16][17][18] that improve power efficiency and viewing performance. Here we report recent progress in stamp-based transfer for microLED displays [3,4,8,9,[19][20][21], latest examples of miniature multi-color emitters (named PixelEngine™ devices) and displays that use them.…”