2013 IEEE International Electron Devices Meeting 2013
DOI: 10.1109/iedm.2013.6724627
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200 mm wafer-scale integration of sub-20 nm sacrificial nanofluidic channels for manipulating and imaging single DNA molecules

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“…Molecules were stretched prior to imaging via gradient nanopillars, which were located in the channels. The IBM team claims that their easy to manufacture design and reproducible techniques (illustrated in Figure ) have a variety of potential applications . This work closely follows that of Rommel's team in 2012, who used the synthetic interference lithography/ion etching technique in an effort to develop a low‐cost, simplistic fabrication method .…”
Section: Micro‐ To Nanofluidics An Introductionmentioning
confidence: 83%
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“…Molecules were stretched prior to imaging via gradient nanopillars, which were located in the channels. The IBM team claims that their easy to manufacture design and reproducible techniques (illustrated in Figure ) have a variety of potential applications . This work closely follows that of Rommel's team in 2012, who used the synthetic interference lithography/ion etching technique in an effort to develop a low‐cost, simplistic fabrication method .…”
Section: Micro‐ To Nanofluidics An Introductionmentioning
confidence: 83%
“…One to three show the microchannel, nanochannel, and vent‐hole modules, respectively. (Figure (a), Reprinted with permission from Ref . Copyright 2013 IBM ) (b) A transmission electron microscope (TEM) image of a sacrificially etched nanochannel with a 5 nm characteristic dimension.…”
Section: Micro‐ To Nanofluidics An Introductionmentioning
confidence: 99%