Quantitative micro-analysis of silicate glasses has been developed using secondary ion mass spec trometry (SIMS). The standard rock references, issued by the Geological Survey of Japan (GSJ), were fused into glass beads and used as standards for SIMS analysis. Thirty eight elements at major, minor and trace concentration levels, were analyzed simultaneously on the standard glasses using an energy filtering technique. In the concentration range of the glass standards, linear relationships were establish ed for the following elements: Li, Be, B, Na, Mg, Al, P, K, Ca, Sc, Ti, V, Cr, Mn, Fe, Co, Cu, Rb, Sr, Y, Zr, Cs, Ba, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu and HE The typical accuracy of the analyses are within 10% of recommended values of GSJ standards for the elements over 1 ppm.