2018
DOI: 10.1063/1.5042506
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17 000%/W second-harmonic conversion efficiency in single-crystalline aluminum nitride microresonators

Abstract: High quality factor optical microcavities have been employed in a variety of material systems to enhance nonlinear optical interactions. While single-crystalline aluminum nitride microresonators have recently emerged as a low loss platform for integrated nonlinear optics such as four wave mixing and Raman lasing, few studies have investigated this material for second-harmonic generation. In this Letter, we demonstrate an optimized fabrication of dually-resonant phase-matched ring resonators from epitaxial alum… Show more

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Cited by 102 publications
(81 citation statements)
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“…Meanwhile, QPM is generally achieved through the periodic poling and hence allows the engineering of the phase-matching wavelengths for specific applications. The po-tential of the LNOI platform, however, is far from being realized as the demonstrated cavity-enhanced-SHG efficiencies of recent works remain much lower than the theoretical value [18] as well as those achieved in integrated AlN platforms with a lower χ 2 coefficient [15].…”
Section: Introductionmentioning
confidence: 94%
See 1 more Smart Citation
“…Meanwhile, QPM is generally achieved through the periodic poling and hence allows the engineering of the phase-matching wavelengths for specific applications. The po-tential of the LNOI platform, however, is far from being realized as the demonstrated cavity-enhanced-SHG efficiencies of recent works remain much lower than the theoretical value [18] as well as those achieved in integrated AlN platforms with a lower χ 2 coefficient [15].…”
Section: Introductionmentioning
confidence: 94%
“…The wide spectral separation between the telecom pump and near-visible SH modes poses a challenge for efficient dual-band waveguide-microring coupling using a conventional straight waveguide (point) coupler due to the significantly weaker coupling strength at shorter SH wavelengths. Compared with the MPM case with an extra SH extraction waveguide [13][14][15], QPM-based SHG involves fundamental telecom and nearvisible modes and allows us to employ a single pulley waveguide shown in Fig. 1(a) to address that issue.…”
Section: A Coupling Design and High-q Ln Microring Fabricationmentioning
confidence: 99%
“…The signal bandwidth is defined by the FWHM. References: AlGaAs-OI chip [13], AlN rings [14], GaAs-OI chip [15], GaAs-OI ring [16], GaP PhC [17], LNOI [18], LNOI ring [19], LN RPE [20], OP-AlGaAs [21], ox-AlGaAs [22], PP-GaN [23], PPKTP [24], SiN/LNOI [25].…”
Section: Introductionmentioning
confidence: 99%
“…While some resonant devices have exceeded this efficiency [14,19], the narrow bandwidth and sensitive phase-matching condition makes them impractical for a fully integrated f -2 f self-referencing system. These resonant devices are better suited for parametric down-conversion applications with narrow bandwidths and squeezed light generation [14,19,34,35]. Furthermore, producing such systems on a large scale requires a high-yield and reproducible fabrication.…”
Section: Introductionmentioning
confidence: 99%
“…The fabrication of such small gaps poses significant technological challenges, as it is approaching the limit of what can be achieved with conventional fabrication means. We report on a robust suspended topology with a bent waveguide design 22 to facilitate reaching critical coupling 4,34 . We demonstrate lasing over a wide range of gap sizes and waveguide bending angles, observing a strong dependence of the lasing threshold on gap size and loaded quality factor (Q loaded ).…”
Section: Introductionmentioning
confidence: 99%