A 16K STATIC RAM using a high d(.nsity buried-contact C\.lOS/SOS process rvill be described. The process allows dircct connection between the Nf doped polysilicon gate and eithcr of thc N+ or P' doped epitaxial layers. bktal overlay is not re-B IT "JDD LINE 9
scite is a Brooklyn-based startup that helps researchers better discover and evaluate scientific articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by researchers from dozens of countries and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.