Ferroelectric thin films using oxides as raw materials

Abstract

This work describes an alternative method for the preparation of ferroelectric thin films based on pre-calcination of oxides, to be used as precursor material for a solution preparation. In order to show the viability of the proposed method, PbZr0.53Ti0.47O3 and Bi4Ti3O12 thin films were prepared on fused quartz and Si substrates. The results were analyzed by X-ray Diffraction (XRD), Scanning Electron Microscopy (SEM), Infrared Spectroscopy (IR) and Rutherford Backscattering Spectroscopy (RBS). The films obtained show good quality, homogeneity and the desired stoichiometry. The estimated thickness for one layer deposition was approximately 1000 Å and 1500 Å for Bi4Ti3O12 and PbZr0.53Ti0.47O3 films, respectively.

Preparation and investigation of ferroelectric Pb(Zr0.53Ti0.47)O3by modified Pechini method

“…By using a solid state reaction, the title compounds are prepared from low cost starting materials but the prepared powders possess microscale average grain size. In contrast, the sol-gel method provides nanoscale average grain size but requires expensive precursors such as TiCl 4 or Ti[O(CH 2 )CH 3 ] 4 [1]. The advantages (nano-sized grains and low cost precussors) of these two method can be combined by applying the modified Pechini method [2].…”

“…A. Eiras et al proposed to make the PZT solutions from pre-calcinated PZT powders. However, due to the use of normal heating calcination methods it could not be dissolved totally PZT in dilute HNO 3 [3][4][5]. In this paper, we prepare and investigate the PZT (53/47) by dissolving calcined PZT (53/47) in dilute HNO 3 using microwave-assisted power.…”

Synthesis and characterization of thin films of Bi4Ti3O12from oxide precursors

“…The oxide precursor method is an alternative method for preparation of ferroelectric thin films starting from prior calcination of oxides or carbonates. The proposed method was applied to the processing of PZT and also to thin films of bismuth titanate, Bi 4 Ti 3 O 12 (BIT) [4]. The method is based on the fact that not all of the precursor oxides (PbO, TiO 2 , ZrO 2 and Bi 2 O 3 ) are soluble in acid media, but a reacted oxide may be soluble.…”