2005
DOI: 10.1590/s0100-40422005000200024
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Abstract: BORON-DOPED CVD DIAMOND FILMS. PART I. HISTORY, PRODUCTION AND CHARACTERIZATION. This review presents a brief account concerning the production, characterization and evolution of the knowledge in the area of diamond and boron-doped diamond films. The most important methods used for the growth of these films, such as chemical vapor deposition and high pressure/high temperature systems, as well as the several kinds of reactors which can be employed are reviewed. However, larger emphasis is given to the CVD metho… Show more

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Cited by 21 publications
(31 citation statements)
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“…Thus, the use of techniques as oxide layer removal and the use of film interlayer previously to the DLC film deposition can improve this adhesion feature. Another used technique consists of the doping of the film with different elements, such as boron, fluorine and nitrogen, which has been widely used to relieve the internal stress of the film [14][15][16].The effects of the nitrogen incorporating in DLC film is the reduction of the internal stress due to the decrease in the formation of carbon atoms with sp 3 hybridization. As a consequence, the film hardness is reduced and the DLC film adhesion on the substrate is facilitated, arousing interest in synthesis and application of these films [15][16][17][18][19][20][21]67].The production of DLC and N-DLC films by plasma enhanced chemical vapor deposition (PECVD) technique comes as a potential alternative of a surface treatment since it presents a relatively low cost, clean technology and formation of the homogeneous and uniform film [9,22].…”
mentioning
confidence: 99%
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“…Thus, the use of techniques as oxide layer removal and the use of film interlayer previously to the DLC film deposition can improve this adhesion feature. Another used technique consists of the doping of the film with different elements, such as boron, fluorine and nitrogen, which has been widely used to relieve the internal stress of the film [14][15][16].The effects of the nitrogen incorporating in DLC film is the reduction of the internal stress due to the decrease in the formation of carbon atoms with sp 3 hybridization. As a consequence, the film hardness is reduced and the DLC film adhesion on the substrate is facilitated, arousing interest in synthesis and application of these films [15][16][17][18][19][20][21]67].The production of DLC and N-DLC films by plasma enhanced chemical vapor deposition (PECVD) technique comes as a potential alternative of a surface treatment since it presents a relatively low cost, clean technology and formation of the homogeneous and uniform film [9,22].…”
mentioning
confidence: 99%
“…Thus, the use of techniques as oxide layer removal and the use of film interlayer previously to the DLC film deposition can improve this adhesion feature. Another used technique consists of the doping of the film with different elements, such as boron, fluorine and nitrogen, which has been widely used to relieve the internal stress of the film [14][15][16].…”
mentioning
confidence: 99%
“…Since diamond surface has a high resistivity, doping with boron is performed in order to obtain semiconducting characteristics. Diamond p-type doping has been achieved by boron substitutional process during the film growth 12 . For diamond growth, PS can influence the nucleation, strain and crystal structure of the films grown on its surface.…”
Section: Introductionmentioning
confidence: 99%
“…The establishment of a doping method of CVD diamond films allowed a wide range of application possibilities of these semiconductor films in different areas of science. One of the applications that aroused most interest was the electrodes manufacture to use in electrochemical applications 12 . Boron doped diamond films grown on porous electrodes have shown excellent electrochemical properties associated with their surface area and dopant concentration 15 .…”
Section: Introductionmentioning
confidence: 99%
“…onde: I t é a corrente a um tempo t (s), n é o número de elétrons (eq mol −1 ), F é a constante de 73,74 . Na sua forma sintética, os diamantes possuem cristais de dimensões demasiadamente reduzidas para poderem ser comercializados como gemas, no entanto, eles também possuem diversas aplicações industriais, em vários setores, tais como 75 Conseqüentemente, é desejável que um composto oxidante possua um potencial redox dentro das seguintes condições: (ii) Realização de estudos complementares por voltametria cíclica para avaliar os perfis voltamétricos dos compostos antioxidantes e das amostras nativas que serão estudadas;…”
Section: Introductionunclassified