1998
DOI: 10.1063/1.1148477
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Abstract: A wide acceptance angle first-order reflectron lens has been incorporated into a three-dimensional atom probe ͑3DAP͒ to provide improved mass resolution. This new 3DAP instrument is capable of resolving isotopes in the mass spectrum, with resolutions better than m/⌬mϭ500 full width at half maximum and 250 full width at 10% maximum. However, use of a reflectron for energy compensation within an imaging system means that improvements in mass resolution result in degradation of the spatial resolution. This articl… Show more

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Cited by 168 publications
(44 citation statements)
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“…APT is a unique technique able to chemically characterize the interfaces at the nanoscale and to visualize them in three dimensions [14][15][16][17] . Highly dilute impurity concentrations in the tens of ppm can be detected because of the high signal-to-noise ratio in the mass spectra.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…APT is a unique technique able to chemically characterize the interfaces at the nanoscale and to visualize them in three dimensions [14][15][16][17] . Highly dilute impurity concentrations in the tens of ppm can be detected because of the high signal-to-noise ratio in the mass spectra.…”
Section: Discussionmentioning
confidence: 99%
“…In the past two decades, Atom Probe Tomography (APT) has emerged as one of the promising nano-analytical techniques [14][15][16][17] . Until recently APT studies of solar cells have been largely restricted by difficulties in the sample preparation process and the limited capability of analyzing semiconductor materials using conventional pulsed-voltage atom probes.…”
Section: Introductionmentioning
confidence: 99%
“…APT and field-ion microscopy (FIM) experiments [25,26] were performed using conventional APT [27,28] and an Imago Scientific Instrument's LEAP tomograph [29]. Prior to conventional APT analysis, specimens were imaged at 40-50 K with FIM at background gauge pressures of neon that varied from 6.7 · 10 À4 to 2.6 · 10 À3 Pa (5 · 10 À6 to 2 · 10 À5 torr).…”
Section: Methodsmentioning
confidence: 99%
“…Therefore, hybrid techniques of CCD readout (precise imaging) and pixel readout (precise timing) have been adopted [17], [18]. Again, the complexity of such special detector set-ups and especially the usually rather low frame rates of the CCD component require the application of alternative concepts.…”
Section: Etection Of Single Particles or Photons With A Microchannementioning
confidence: 99%