2006
DOI: 10.1021/jp064371z
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Abstract: Here we demonstrate design, fabrication, and testing of electronic sensor array based on single-walled carbon nanotubes (SWNTs). Multiple sensor elements consisting of isolated networks of SWNTs were integrated into Si chips by chemical vapor deposition (CVD) and photolithography processes. For chemical selectivity, SWNTs were decorated with metal nanoparticles. The differences in catalytic activity of 18 catalytic metals for detection of H(2), CH(4), CO, and H(2)S gases were observed. Furthermore, a sensor ar… Show more

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Cited by 552 publications
(396 citation statements)
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“…Conductivity-based CO detection has been reported for carboxylate-containing, [19] deformed, [21] or doped SWCNTs, [22] as well as SWCNTs dispersed in polymers [23] or decorated with metallic nanoparticles. [24] Alternatively, nonchemiresistive examples of SWCNT CO detectors rely on other mechanisms including changes in capacitance [25] and resonant frequency. [26] Although as summarized CO detectors based on SWCNTs have been reported, none make use of an in situ activated selector to produce additional selectivity and sensitivity.…”
Section: Introductionmentioning
confidence: 99%
“…Conductivity-based CO detection has been reported for carboxylate-containing, [19] deformed, [21] or doped SWCNTs, [22] as well as SWCNTs dispersed in polymers [23] or decorated with metallic nanoparticles. [24] Alternatively, nonchemiresistive examples of SWCNT CO detectors rely on other mechanisms including changes in capacitance [25] and resonant frequency. [26] Although as summarized CO detectors based on SWCNTs have been reported, none make use of an in situ activated selector to produce additional selectivity and sensitivity.…”
Section: Introductionmentioning
confidence: 99%
“…The main methods used so far were electron-beam evaporation, sputtering and thermal evaporation. Electron beam evaporation was used to decorate CNT with Pd (Kong, Chapline and Dai 2001), Pt, Sn, Rh (Star et al 2006). Using sputtering (Lu et al 2004) and (Sayago et al 2007) SWCNTS were decorated with Pd.…”
Section: Physical Methods To Decorate Cntmentioning
confidence: 99%
“…1 Even exposure of an inert gas gives an influence on the electrical conductivity of SWCNT with the atom collision-induced distortion in the graphene wall, 2 although adsorption of electron donor or electron acceptor gases markedly changes the electrical conductivity of SWCNT. [3][4][5] SWCNTs form an ordered bundle structure of a 2D hexagonal superlattice due to the inter-tube dispersion interaction. 6,7 Therefore, if we remove caps from SWCNT by oxidation-treatment, the open SWCNT bundles have three kinds of adsorption sites for molecules and atoms of the internal tube spaces, interstitial pore spaces and groove sites.…”
Section: Introductionmentioning
confidence: 99%