Introduction to Plasma Physics and Controlled Fusion

Chen, Francis F.

doi:10.1007/978-1-4757-5595-4

Cited by 2,234 publications

(1,412 citation statements)

References 0 publications

Supporting

Mentioning

1,341

Contrasting

Unclassified

Order By: Relevance

“…is the electron speed perpendicular to the magnetic field B. In the presence of an electric field the electron exhibits a net drift perpendicular to both the B and E field vectors, often referred to as the Hall drift, or the E Â Bdrift, 49,73 which is given by…”

Section: -63mentioning

confidence: 99%

High power impulse magnetron sputtering discharge

Guðmundsson¹,

Brenning²,

Lundin³

et al. 2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

596

432

View full text Add to dashboard Cite

The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron target in unipolar pulses at low duty cycle and low repetition frequency while keeping the average power about 2 orders of magnitude lower than the peak power. This results in a high plasma density, and high ionization fraction of the sputtered vapor, which allows better control of the film growth by controlling the energy and direction of the deposition species. This is a significant advantage over conventional dc magnetron sputtering where the sputtered vapor consists mainly of neutral species. The HiPIMS discharge is now an established ionized physical vapor deposition technique, which is easily scalable and has been successfully introduced into various industrial applications. The authors give an overview of the development of the HiPIMS discharge, and the underlying mechanisms that dictate the discharge properties. First, an introduction to the magnetron sputtering discharge and its various configurations and modifications is given. Then the development and properties of the high power pulsed power supply are discussed, followed by an overview of the measured plasma parameters in the HiPIMS discharge, the electron energy and density, the ion energy, ion flux and plasma composition, and a discussion on the deposition rate. Finally, some of the models that have been developed to gain understanding of the discharge processes are reviewed, including the phenomenological material pathway model, and the ionization region model.

show abstract

Section: -63mentioning

confidence: 99%

High power impulse magnetron sputtering discharge

Guðmundsson¹,

Brenning²,

Lundin³

et al. 2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

596

432

View full text Add to dashboard Cite

show abstract

“…Thus, an electrically neutral probe will not record the plasma potential, but a lower value denoted as the floating potential V f loat , whose difference from V plasma is a function of the electron temperature. 18 The bias voltage is then programmed to sweep the probe through potentials ∼ ±20 V from the floating potential in order to span the region well beyond the expected position of the plasma potential (above V f loat ) and the ion saturation region (below V f loat ). The current, I, at each bias voltage, V , can be seen in Fig.…”

Section: E Plasma Probesmentioning

confidence: 99%

The use of dc glow discharges as undergraduate educational tools

Wissel

Zwicker

Ross

et al. 2013

American Journal of Physics

View full text Add to dashboard Cite

Plasmas have a beguiling way of getting students excited and interested in physics. We argue that plasmas can and should be incorporated into the undergraduate curriculum as both demonstrations and advanced investigations of electromagnetism and quantum effects. Our device, based on a direct current (DC) glow discharge tube, allows for a number of experiments into topics such as electrical breakdown, spectroscopy, magnetism, and electron temperature.

show abstract

“…Typically, perturbations at a given spatial and/or temporal scale become unstable when the amount of injected energy exceeds a threshold value. Such a spontaneous self-organization manifests itself in many branches of physics: plasma instabilities, for instance, play a major role in fusion research [2]. Symmetry breaking instabilities are ubiquitous in chemistry, fluid dynamics, or biology [3].…”

mentioning

confidence: 99%

“…For a sample of two-level atoms with optical density b 0 one has χ 0 = b 0 δ Γ(1 + 4δ 2 /Γ 2 ) −1 . Similarly, a plasma acts as a purely dispersive medium with a density-dependent susceptibility [2]. In what follows definitions are chosen so that the uniform density solution is n h = 1.…”

mentioning

confidence: 99%

Kinetic Theory for Transverse Optomechanical Instabilities

et al. 2014

View full text Add to dashboard Cite

This version is available at https://strathprints.strath.ac.uk/47887/ Strathprints is designed to allow users to access the research output of the University of Strathclyde. Unless otherwise explicitly stated on the manuscript, Copyright © and Moral Rights for the papers on this site are retained by the individual authors and/or other copyright owners. Please check the manuscript for details of any other licences that may have been applied. You may not engage in further distribution of the material for any profitmaking activities or any commercial gain. You may freely distribute both the url (https://strathprints.strath.ac.uk/) and the content of this paper for research or private study, educational, or not-for-profit purposes without prior permission or charge.Any correspondence concerning this service should be sent to the Strathprints administrator: strathprints@strath.ac.ukThe Strathprints institutional repository (https://strathprints.strath.ac.uk) is a digital archive of University of Strathclyde research outputs. It has been developed to disseminate open access research outputs, expose data about those outputs, and enable the management and persistent access to Strathclyde's intellectual output.

show abstract

Introduction to Plasma Physics and Controlled Fusion

Cited by 2,234 publications

References 0 publications

High power impulse magnetron sputtering discharge

High power impulse magnetron sputtering discharge

The use of dc glow discharges as undergraduate educational tools

Kinetic Theory for Transverse Optomechanical Instabilities

Contact Info

Product

Resources

About