Abstract:As process technologies advance to the subwavelength era, the 1-D design style is regarded as one of the most effective ways to continue scaling down the minimum feature size. To improve the printability of 1-D cell design, it is essential to insert dummy patterns and optimize line-end gap distribution for each layer. This paper presents novel 1-D cell generation algorithms that simultaneously minimize 1-D cell area and enhance the printability. Experimental results show that the proposed algorithms can effect… Show more
scite is a Brooklyn-based startup that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.