Effect of nitrogen plasma composition on structural-phase and elemental composition, topography, mechanical and hydrophobic properties of coatings on the basis of nitrogen-containing titanium oxide during penetration onto sample in open atmosphere is studied. It has been shown that at an equally high microhardness of the order of 25-27 GPa, by controlling the composition of the nitrogen plasma, either hydrophilic (contact angle 73 °) or hydrophobic coatings (contact angle 120 °) can be formed.
Results of the formation of superhard coatings in the low-temperature nitrogen plasma treatment process in the open atmosphere of titanium films on sapphire substrates are given. It is shown that during plasma treatment a coating of nitrogen-containing TiO2 with rutile structure is formed with a double increase (in comparison with rutile TiO2) of microhardness (up to 27 GPa). The application of this coating leads to hardening of the surface of sapphire plates by 22-23%. High productivity and implementation of synthesis in an open atmosphere make it possible to consider the proposed procedure is promising for the production of superhard coatings with high resistance to oxygen.
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