Polytetrafluoroethylene (PTFE) coatings were prepared on Si and acrylonitrile-butadiene rubber substrates by lowenergy electron beam dispersion. The effects of substrate nature, distance of target to substrate (d ts ) and coatings thickness on the surface morphology, structure, and tribological properties of the coatings were investigated. The results showed that substrate nature affects the shape and size distribution of surface conglomerations of PTFE coatings due to the interaction process of active dispersion particles with underlying polymer layer. Surface energy of PTFE coatings decreases first with the coatings thickness increases to 1.25 μm and then slowly increases with the thickness. Structure defects (pore, interstice, and so on) in the coatings increase with the thickness increases but reduce significantly with the d ts increases. PTFE coating prepared at the d ts of 20 cm had a higher intensity of the amorphous absorption bands. Friction experiment indicated that the destroyed area of the coatings in the friction region decreases with increases the coatings thickness but increases with the d ts . The rubber modified by PTFE coatings with spherical structure possesses a higher stability in the friction process and a lower coefficient of friction.
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