Abstract-The effect of the pressure of the nitrogen atmosphere during the formation of vacuum arc nitride coatings based on high entropy alloys of the Ti-Zr-Hf-V-Nb-Ta system on their structure, hardness, and tribotechnical characteristics is considered. It is shown that strong nitride forming components lead to the dependence of the structural state and properties on the pressure of the nitrogen atmosphere during coating deposition. Deposition at a nitrogen pressure of 0.4 Pa results in the formation of a texture with the [111] axis when the applied bias potential is -70 V and when the bias potential is equal to -150 V the textural structure is biaxial ([111] and [110]) textures and high value of hardness of 51 GPa Along with that the highest value of wear resistance (under oxidizing mechanical wear) is inherent to coatings formed under the pressure of nitro gen of 0.09 Pa. The strongest microdeformation of coating crystallites corresponds to this pressure.

Zr-Ti-Si-N coating had high thermal stability of phase composition and remained structure state under thermal annealing temperatures reached 1180 degrees C in vacuum and 830 degrees C in air. Effect of isochronous annealing on phase composition, structure, and stress state of Zr-Ti-Si-N-ion-plasma deposited coatings (nanocomposite coatings) was reported. Below 1000 degrees C annealing temperature in vacuum, changing of phase composition is determined by appearing of siliconitride crystallites (beta-Si3N4) with hexagonal crystalline lattice and by formation of ZrO2 oxide crystallites. Formation of the latter did not result in decay of solid solution (Zr, Ti)N but increased in it a specific content of Ti-component. Vacuum annealing increased sizes of solid solution nanocrystallites from (12 to 15) in as-deposited coatings to 25 nm after annealing temperature reached 1180 degrees C. One could also find macro- and microrelaxations, which were accompanied by formation of deformation defects, which values reached 15.5 vol.%. Under 530 degrees C annealing in vacuum or in air, nanocomposite coating hardness increased. When Ti and Si concentration increased and three phases nc-ZrN, (Zr, Ti)N-nc, and alpha-Si3N4 were formed, average hardness increased to 40.8 +/- 4 GPa. Annealing to 500 degrees C increased hardness and demonstrated lower spread in values H = 48 +/- 6 GPa and E = (456 +/- 78) GPa. Zr-Ti-Si-N coatings has high wear resistance and low friction coefficient in comparison at a temperature of 500 degrees C possess with coatings TiN, Ti-Si-N.

No abstract

No abstract

The tribological properties of TiN, MoN, and TiN/MoN coatings have been investigated. It has been shown that, for multilayer (alternate) TiN/MoN coatings, a maximum hardness reaches 29-31 GPa that is significantly less than the hardness of MoN coatings (36.0-40.2 GPa) when changing the deposition conditions. MoN coatings possess lower coefficients of friction compared to TiN coatings, in particular at the initial stages of a scratch test. Two mechanisms of destruction are revealed by the adhesion tests, i.e., a cohe sive failure with a minimum critical loading L C1 and an adhesive test (plastic abrasion) with the appearance of a first crack L C2 . The resistance of multilayer (nanoscale) nanostructured TiN/MoN coatings with a total thickness of up to 8 μm is greater than that of TiN coatings.