Flexible hydrogen sensors based on palladium (Pd) and titanium dioxide (TiO2) nanofilm on poly(dimethylsiloxane) (PDMS) substrate have been demonstrated. We have prepared PDMS using anodic aluminum oxide template and researched the performance of Pd/TiO2 nanofilm based hydrogen sensors with different thickness of TiO2. The sensor with 6nm thickness of TiO2 has demonstrated the best performance with a response/recovery time of 1.6 s/6 s at 0.2% hydrogen concentration, respectively.
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