Abstract-A zinc oxide (ZnO) nanorod based surface acoustic wave (SAW) sensor has been developed and investigated towards hydrogen (H 2 ) gas. The ZnO nanorods were deposited onto a layered ZnO/64° YX LiNbO 3 substrate using a liquid solution method. Micro-characterization results revealed that the diameters of ZnO nanorods are around 100 and 40 nm on LiNbO 3 and Au (metallization for electrodes), respectively. The sensor was exposed to different concentrations of H 2 in synthetic air at operating temperatures between 200°C and 300°C. The study showed that the sensor responded with highest frequency shift at 265°C. At this temperature, stable base-line and fast response and recovery were observed.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.