Abstract-ElectricalDischarge/Spark Machining (EDM/ESM) is an advanced machining process that has various applications in macro and micro fabrication. Advantages and intrinsic potentials of the process is promising application of this process in nanofabrication. The spark nanomachining is a precise, sensitive and costly process. Therefore, simulation of nano-hole produced by each spark in this process prevents spending extra time and cost to perform spark nanomachining process through trial and error method. In this paper nano-hole machined by the spark nanomachining process on a gold nano-film is simulated under practically experimental conditions. Radius, depth and volume of the nano-hole are evaluated versus process conditions. It is observed that radius of the nano-hole is increased exponentially with increasing spark pulse duration. Also, depth, volume of the removed material from the workpiece surface and material removal rate (MRR) are increased with increasing consumed energy by each spark.
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