A central challenge in developing quantum computers and long-range quantum networks lies in the distribution of entanglement across many individually controllable qubits 1 . Colour centres in diamond have emerged as leading solid-state 'artificial atom' qubits 2,3 , enabling on-demand remote entanglement 4 , coherent control of over 10 ancillae qubits with minute-long coherence times 5 , and memory-enhanced quantum communication 6 . A critical next step is to integrate large numbers of artificial atoms with photonic architectures to enable large-scale quantum information processing systems. To date, these efforts have been stymied by qubit inhomogeneities, low device yield, and complex device requirements. Here, we introduce a process for the high-yield heterogeneous integration of 'quantum micro-chiplets' (QMCs) -diamond waveguide arrays containing highly coherent colour centreswith an aluminium nitride (AlN) photonic integrated circuit (PIC). Our process enables the development of a 72-channel defect-free array of germanium-vacancy (GeV) and silicon-vacancy (SiV) colour centres in a PIC. Photoluminescence spectroscopy reveals long-term stable and narrow average optical linewidths of 54 MHz (146 MHz) for GeV (SiV) emitters, close to the lifetime-limited linewidth of 32 MHz (93 MHz). Additionally, inhomogeneities in the individual qubits can be compensated in situ with integrated tuning of the optical frequencies over 100 GHz. The ability to assemble large numbers of nearly indistinguishable artificial atoms into phase-stable PICs provides an architecture toward multiplexed quantum repeaters 7,8 and general-purpose quantum computers [9][10][11] . Main textArtificial atom qubits in diamond combine minute-scale quantum memory times 5 with efficient spin-photon interfaces 2 , making them attractive for processing and distributing quantum information 1,3 . However, the low device yield of functional qubit systems presents a critical barrier to large-scale quantum information processing (QIP). Furthermore, although individual diamond cavity systems coupled to artificial atoms can now achieve excellent performance, the lack of active chip-integrated photonic components and wafer-scale single crystal diamond currently prohibit scaling to large-scale QIP applications [8][9][10][11] . A promising method to alleviate these constraints is heterogeneous integration (HI), which is increasingly used in advanced microelectronics to assemble separately fabricated sub-components into a single, multifunctional chip. HI approaches have also recently been used to integrate PICs with quantum devices, including quantum dot single-photon sources 12,13 , superconducting nanowire single-photon detectors 14 , and nitrogen-vacancy (NV) centre diamond waveguides 15 . However, these demonstrations assembled components one-by-one, which presents a formidable scaling challenge. The diamond 'quantum micro-chiplet (QMC)' introduced here significantly improves HI assembly yield and accuracy to enable a 72-channel defect-free waveguide-coupled art...
Optical tweezers have been widely used to manipulate biological and colloidal material, but the diffraction limit of far-field optics makes focused beams unsuitable for manipulating nanoscale objects with dimensions much smaller than the wavelength of light. While plasmonic structures have recently been successful in trapping nanoscale objects with high positioning accuracy, using such structures for manipulation over longer range has remained a significant challenge. In this work, we introduce a conveyor belt design based on a novel plasmonic structure, the resonant C-shaped engraving (CSE). We show how long-range manipulation is made possible by means of handoff between neighboring CSEs, and we present a simple technique for controlling handoff by rotating the polarization of laser illumination. We experimentally demonstrate handoff between a pair of CSEs for polystyrene spheres 200, 390, and 500 nm in diameter. We then extend this technique and demonstrate controlled particle transport down a 4.5 μm long "nano-optical conveyor belt."
has been demonstrated for instance with epitaxially grown quantum dots (QDs). In this case the QD can be pre-characterized and subsequently lifted off and positioned onto a resonator fabricated from conventional semiconductors such as silicon or silicon nitride. [13][14][15] This pick-and-place approach is laborious and requires sophisticated nanomanipulators within scanning electron microscope. It also suffers from limited precision of alignment and positioning of the source with respect to the resonator. In a complementary methodology, stamping techniques with polydimethylsiloxane (PDMS) rubber stamps or similar materials have also been demonstrated. [16,17] However, on balance, single-photon emission from the epitaxially grown QDs can only operate at cryogenic temperatures.A promising approach to the above issues is the use of emerging single-photon emitters in 2D materials. [18][19][20] Due to the 2D nature of the host, they can be transferred onto photonic structures via exfoliation and stamping, reproducibly and in ambient conditions. [21] Indeed, the first work on the coupling of quantum dots in 2D materials containing emitters-namely layered GaSe [22] or WSe 2 , [23,24] to photonic resonators have successfully been realized. However, due to the nature of the emission from these sources, their operation was limited to cryogenic temperatures. Quantum emitters in layered hBN are an ideal alternative. These sources are ultrabright and operate at room temperature. [25][26][27][28][29][30] Taking the advantage of these features, in this work we report the integration of room-temperature hBN quantum emitters with aluminum nitride (AlN) waveguides. We demonstrate transmission of nonclassical light through the waveguide, hence paving the way for future and more complex realizations including photon multiplexing and photonic circuitry on chip.
Coincidence detection of single photons is crucial in numerous quantum technologies and usually requires multiple time-resolved single-photon detectors. However, the electronic readout becomes a major challenge when the measurement basis scales to large numbers of spatial modes. Here, we address this problem by introducing a two-terminal coincidence detector that enables scalable readout of an array of detector segments based on superconducting nanowire microstrip transmission line. Exploiting timing logic, we demonstrate a sixteen-element detector that resolves all 136 possible single-photon and two-photon coincidence events. We further explore the pulse shapes of the detector output and resolve up to four-photon events in a four-element device, giving the detector photon-number-resolving capability. This new detector architecture and operating scheme will be particularly useful for multi-photon coincidence detection in large-scale photonic integrated circuits.
We demonstrate a wide-bandgap semiconductor photonics platform based on nanocrystalline aluminum nitride (AlN) on sapphire. This photonics platform guides light at low loss from the ultraviolet (UV) to the visible spectrum. We measure ring resonators with intrinsic quality factor (Q) exceeding 170,000 at 638 nm and Q >20,000 down to 369.5 nm, which shows a promising path for low-loss integrated photonics in UV and visible spectrum. This platform opens up new possibilities in integrated quantum optics with trapped ions or atom-like color centers in solids, as well as classical applications including nonlinear optics and on-chip UV-spectroscopy.
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