Based on the cross correlation analysis of the Kikuchi diffraction patterns high-resolution EBSD is a well established method to determine the internal stress in deformed crystalline materials. In many cases, however, the stress values obtained at the different scanning points have a large (in the order of GPa) scatter. As it was first demonstrated by Wilkinson and co-workers this is due to the long tail of the probability distribution of the internal stress ($P(\sigma)$) generated by the dislocations present in the system. According to the theoretical investigations of Groma and co-workers the tail of $P(\sigma)$ is inverse cubic with prefactor proportional to the total dislocation density $<\rho>$. In this paper we present a direct comparison of the X-ray line broadening and $P(\sigma)$ obtained by EBSD on deformed Cu single crystals. It is shown that $<\rho>$ can be determined from $P(\sigma)$. This opens new perspectives for the application of EBSD in determining mesoscale parameters in a heterogeneous sample

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Mechanical testing of micropillars is a field that involves new physics, as the behaviour of materials is non-deterministic at this scale. To better understand their deformation mechanisms we applied 3-dimensional high angular resolution electron backscatter diffraction (3D HR-EBSD) to reveal the dislocation distribution in deformed single crystal copper micropillars. Identical micropillars were fabricated by focused ion beam (FIB) and compressed at room temperature. The deformation process was stopped at different strain levels (≈ 1%, 4% and 10%) to study the evolution of geometrically necessary dislocations (GNDs). Serial slicing with FIB and consecutive HR-EBSD mapping on the (100) side was used to create and compare 3-dimensional maps of the deformed volumes. Average GND densities were calculated for each deformation step. Total dislocation density calculation based on X-ray synchrotron measurements were conducted on the 4% pillar to compare dislocation densities determined by the two complementary methods. Scanning transmission electronmicroscopy (STEM) and transmission electronmicroscopy (TEM) images were captured on the 10% pillar to visualize the actual dislocation structure. With the 3D HR-EBSD technique we have studied the geometrically necessary dislocations evolving during the deformation of micropillars. An intermediate behaviour was found at the studied sample size between bulk and nanoscale plasticity: A well-developed dislocation cell structure built up upon deformation but with significantly lower GND density than in bulk. This explains the simultaneous observation of strain hardening and size effect at this scale.

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