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This paper describes the measurement results of piezoelectric harvesters with AlN as piezoelectric material. The output power harvested from mechanical vibrations has been measured on micromachined harvesters with different geometries. The resonance frequencies ranged from 200 up to 1200 Hz. A maximum output power of 60 µW has been measured at an acceleration of 2.0 g at a resonance frequency of 571 Hz; the power output is of the same level as obtained with devices based on PZT. The package of the harvester requires special attention, since air-damping can significantly decrease the maximum power output.

In the first line of table 1, the formula for m (kg) should be: 33 140 ρW(t s + 2t p )l 3 + m t in place of 33 140 ρW(t s + 2t p )l 3 + m t l 3 . In equation (2), the symbol m is in one spot placed in a subscript position when it should not be. The corrected formula is v M0 = mv b0 +Mv M0 + em(v b0 −v M0 ) M+m in place of v M0 = mv b0 +Mv M0 + e m (v b0 −v M0 ) M+m.