The making of 3-D nanostructured metal oxide films is an active and competitive area of research, aiming at novel materials with enhanced properties and sensing devices with improved performances. Here we present the preparation procedure and gas sensing behavior of a novel self-assembled 3-D WO 3 nanofilm that effectively combines the advantages of inorganic materials with the simplicity and universality offered by electrochemistry-based formation techniques. The film is formed mainly by electrochemical anodizing and is composed of an array of spatially-ordered upright-standing WO 3 nanorods, assembled between the two noble metal patterned electrodes, which serve as direct semiconducting pathways for chemisorption reactions in a gas atmosphere. A test microsensor employing the nanofilm and assembled on a standard TO-8 Metal Can Package showed the fast and intensive response to H 2 , leaving more opportunities for further improvement of the active film configuration and sensor performance based on the computer-aided modelling and simulation results.
Nanostructured Zr-W mixed oxide film was prepared via anodizing a sputter-deposited Zr-W alloy layer through nanopores in an anodic alumina layer superimposed on the alloy. The morphology, structure and chemical composition of the film were examined by SEM and XRD. Test sensor employing the ZrO 2 -WO 3 mixed oxide film as active layer was fabricated and utilized for detecting H 2 and CO gases of various concentrations (100-1000 ppm) at temperatures up to 300°C. The sensor was fast and highly responsive to hydrogen while showing much weaker and slower response to carbon oxide. The findings are of importance for improving chemical and structural stability of the nanostructured tungsten-oxide-based films and selectivity of gas sensors employing the films.
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