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The chemical and thermal-mechanical stability of sputtered aluminum oxide films are examined. Sputtered alumina is quite soluble in bases and phosphate-containing solutions. Carbon dioxide was detected in the films by infrared spectroscopy and by mass spectroscopy during thermal gravimetric analysis; the presence of CO2 is likely due to adsorption on the sputtered film. Heating and cooling of sputtered alumina results in an irreversible expansion of the film. The anomalous expansion is cumulative with additional higher temperature heating, similar to a thermal ratchet effect, until a temperature of 850°C is reached. At temperatures above 850°C rapid argon evolution from the sputtered film occurs and is accompanied by film contraction.

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