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Accurate temperature measurements can efficiently solve numerous critical problems and provide key information. Herein, a flexible micro-three-dimensional sensor, with a combination of platinum and indium oxide to form thermocouples, is designed and fabricated by a microfabrication process to achieve in situ real-time temperature measurements. The stability and reliability of the sensor are greatly improved by optimizing the process parameters, structural design, and preparation methods. A novel micro-three-dimensional structure with better malleability is designed, which also takes advantage of the fast response of a two-dimensional thin film. The as-obtained flexible temperature sensor with excellent stability and reliability is expected to greatly contribute to the development of essential components in various emerging research fields, including bio-robot and healthcare systems. The model of the application sensor in a mask is further proposed and designed to realize the collection of health information, reducing the number of deaths caused by the lack of timely detection and treatment of patients.

Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products. However, most of the current flexible temperature sensors only work well in a narrow temperature range, with their application at high or low temperatures still being a big challenge. This work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate, the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin oxide. It has good temperature sensitivity, with the test sensitivity reaching 226.7 μV °C−1 . Most importantly, it can work in a wide temperature range, from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200 °C, which is difficult to be achieved by other existing flexible temperature sensors. This temperature sensor has huge application potential in biomedicine, aerospace and other fields.

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