Active metasurfaces, whose optical properties can be modulated post-fabrication, have emerged as an intensively explored field in recent years. The efforts to date, however, still face major performance limitations in tuning range, optical quality, and efficiency, especially for non-mechanical actuation mechanisms. In this paper, we introduce an active metasurface platform combining phase tuning in the full 2π range and diffraction-limited performance using an all-dielectric, low-loss architecture based on optical phase change materials (O-PCMs). We present a generic design principle enabling binary switching of metasurfaces between arbitrary phase profiles and propose a new figure-of-merit (FOM) tailored for reconfigurable meta-optics. We implement the approach to realize a high-performance varifocal metalens operating at 5.2 μm wavelength. The reconfigurable metalens features a record large switching contrast ratio of 29.5 dB. We further validate aberration-free and multi-depth imaging using the metalens, which represents a key experimental demonstration of a non-mechanical tunable metalens with diffraction-limited performance.

Wide field-of-view (FOV) optical functionality is crucial for implementation of advanced imaging and image projection devices. Conventionally, wide FOV operation is attained with complicated assembly of multiple optical elements known as "fisheye lenses". Here we present a novel metalens design capable of performing diffractionlimited focusing and imaging over an unprecedented near 180°angular FOV. The lens is monolithically integrated on a one-piece flat substrate and involves only a single layer of metasurface that corrects third-order Seidel aberrations including coma, astigmatism, and field curvature. The metalens further features a planar focal surface, which enables considerably simplified system architectures for applications in imaging and projection. We fabricated the metalens using Huygens meta-atoms operating at 5.2 μm wavelength and experimentally demonstrated aberration-free focusing and imaging over the entire FOV. The design concept is generic and can be readily adapted to different meta-atom geometries and wavelength ranges to meet diverse application demands.

We demonstrate a monolithic waveguide sensor integrated with a detector on-chip for mid-infrared absorption spectroscopic sensing. The optical sensing element comprises a chalcogenide glass spiral waveguide, and the detector is a PbTe photoconductor integrated directly with the chalcogenide waveguide. The limit of detection of the sensor for methane gas was experimentally assessed to be 1% by volume. Further optimization of the fabrication process and normalization of the laser power fluctuations should result in a maximum sensitivity of 330 ppmv.

We experimentally demonstrate an on-chip polycrystalline PbTe photoconductive detector integrated with a chalcogenide glass waveguide. The device is monolithically fabricated on silicon, operates at room-temperature, and exhibits a responsivity of 1.0 A/W at wavelengths between 2.1 and 2.5 μm.

We propose an on-chip mid-infrared (MIR) photonic spectroscopy platform for aerosol characterization to obtain highly discriminatory information on the chemistry of aerosol particles. Sensing of aerosols is crucial for various environmental, climactic, warfare threat detection, and pulmonary healthcare applications. Currently, chemical characterization of aerosols is performed using FTIR spectroscopy yielding chemical fingerprinting because most of the vibrational and rotational transitions of chemical molecules fall in the MIR range; and Raman spectroscopy. Both techniques use free space bench-top geometries.Here, we propose miniaturized on-chip MIR photonics-based aerosol spectroscopy consisting of a broadband spiral-waveguide sensor that significantly enhances particle-light interaction to improve sensitivity. The spiral waveguides are made of a chalcogenide glass material (Ge23Sb7S70) which shows a broad transparency over IR range. We demonstrate the sensing of Nmethyl aniline-based aerosol particles with the device. We anticipate that the sensor will readily complement existing photonic resonator-based particle sizing and counting techniques to develop a unified framework for on-chip integrated photonic aerosol spectroscopy.