Abstract. Sensors based on MOSFET with por-Si layer at the back-gate part and with H2О2 catalyst (Pt-nanoparticles) investigation was done. Back-gate changes were done by MASE technology. The porous structure analysis, measurement dimension of Pt nanoparticles was performed. And also we represented the influence thus nanoparticles for sensor sensitivity. Аннотация. Было проведено исследования сенсоров на базе МДН-транзисторов со слоем пористого кремния и катализатором перекиси водорода ( наночастицами платины) на обратной стороне подложки со стороны затвора. Изменения тыльной стороны сенсора производилась методом металл-стимулированного химического травления. Произведено анализ пористой структуры, измерено размер наночастиц платины и их влияние на чувствительность сенсора. Используя аппроксимации вольт-амперных характеристик при разных концентрациях перекиси водорода рассчитано чувствительность сенсора, которая составляет не менее 0,135 мкА/ppm. Рассчитано энергетическую активность реакции каталитического распада H 2 О 2 та ее влияние на результаты эксперимента.Ключевые слова: МДН-транзистор, сенсор, перекис водорода, пористый кремний, Pt на-ночастицы
No abstract
The humidity sensor is an important device used in many areas of human life, such as agriculture, medicine, industry, meteorology and more. Most often, synthetic polymers are used for the manufacture of humidity sensors, which after the end of their operation are accumulated in the form of electronic waste, polluting the environment. Currently, biodegradable polymers are in great demand. Such materials include nanocellulose, which can be made from both wood and plant raw materials. It has already been proven that nanocellulose is a promising material for use in humidity-sensitive devices. However, it was not clear the effect of sensitive film’s thickness on the characteristics of humidity sensors. In this work, capacitive humidity sensors based on nanocellulose were fabricated. Nanocellulose (NC) was obtained from reeds by the TEMPO method. The moisture-sensitive layer of NC was applied by dripping. Static (sensitivity, response, hysteresis) and dynamic (response time, recovery time, short- and long-term stability) characteristics of the manufactured humidity sensors were measured in dependence on mass of NC film (from 0.3 to 3.6 mg) and test signal frequency (100 Hz and 1000 Hz). The response of the sensors was increased with the weight of moisture-sensitive NC film and reached 1412 nF at 100 Hz (783 nF at 1000 Hz) for the sample of 0.6 mg NC, and then decreased with further increase in mass. The sensitivity of the sensors varied similarly, but the maximum value was observed for the sample with a mass of 1.8 mg and was 0.161 (%RH)-1 for 100 Hz (0.165 (%RH)-1 for 1000 Hz). The shortest response time had the sample with the lowest mass of moisture-sensitive film (100 s). With a further increase in the mass of moisture-sensitive NC film, the response and recovery time increased monotonically. Also, the sample with the lowest mass of the moisture-sensitive layer shows the lowest value of hysteresis (0.1%) and also increased with the increasing mass of the moisture-sensitive layer. In the study of short-term stability, samples weighing from 0.3 to 0.6 mg showed a significantly higher level of fluctuations (10 - 20%) compared to samples with a weight of the moisture-sensitive layer of 1.8 - 3.6 mg (1 - 4%). So, you should use nanocellulose film of larger mass (1.8… 3.6 mg) in order to improve the sensitivity and short-term stability of the devices. In view of the responce and recovery time as well as repeatability of the sensor characteristics, thin nanocellulose films (0.3… 0.5 mg) should be used. The direction of further research is to improve the long-term stability of the devices, in particular by modifying the nanocellulose film with adding certain impurities.
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