Cu2SnS3 thin films were prepared by crystallization in a sulfur/tin mixing atmosphere from stacked NaF/Cu/Sn precursors deposited by the sequential evaporation of Sn, Cu elements, and NaF. The NaF mole ratio was changed at (x = 0 to 0.12). From X-ray diffraction patterns and Raman spectra, the Cu2SnS3 thin films were considered to have a monoclinic structure. The grain size of the Cu2SnS3 thin films decreased with increasing NaF/Cu mole ratio. The band-gap energies of the Cu2SnS3 thin films determined from quantum efficiency spectra were 0.93 and 1.02 eV. The solar cell with x = 0.075 demonstrated the best performance, namely, Voc = 283 mV, Isc = 37.3 mA/cm2, FF = 0.439, and η = 4.63%.
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