Erratum: "Work function tuning and improved gate dielectric reliability with multilayer graphene as a gate electrode for metal oxide semiconductor field effect device applications" [Appl.Graphene with varying number of layers is explored as metal gate electrode in metal oxide semiconductor structure by inserting it between the dielectric (SiO 2 ) and contact metal (TiN) and results are compared with TiN gate electrode. We demonstrate an effective work function tuning of gate electrode upto 0.5 eV by varying the number of graphene layers. Inclusion of even 1-3 layers of graphene results in significantly improved dielectric reliability as measured by breakdown characteristics, charge to breakdown, and interface state density. These improvements are attributed to the impermeability of graphene for TiN and hence reduced metallic contamination in the dielectric.
We here present, metal nanocrystal (NC) formation statistics (size, density, occupancy or area coverage) on different high dielectric constant (high-K) materials which may be used as tunnel dielectric or intermetal dielectric in flash memory devices. Four important high-K materials viz. SiO2, Al2O3, HfO2 and Si3N4 are chosen for this purpose and the nanocrystal formation statistics has been found to be strongly dependent on dielectric. Among all the four dielectrics, smallest size nanocrystals with largest density are obtained on Al2O3 dielectric while on HfO2 bigger size nanocrystals are formed. This difference in nanocrystal size and density on different dielectrics is attributed to the different surface properties of these materials.
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