The self-repair of an ordered pattern of nanometer dimensions based on the self-compensation properties of anodic porous alumina is demonstrated. In a pretextured pattern formed on Al using the nanoindentation process with an array of convexes, the deficiency sites of the pattern were found to be compensated automatically during the anodization. Combining the self-compensation properties of the pore configuration of the anodic porous alumina with the preparation of a replica of the compensated porous structure allowed us to develop a process which has the capability of self-repairing the imperfections in the starting pattern. It was confirmed that deficiencies in the starting pattern could be repaired automatically in the Ni pattern regenerated using the self-compensated anodic porous alumina as a template.
Highly ordered anodic porous alumina was fabricated by anodization of vapor-deposited Al that had been deposited on a self-organized periodic array of polystyrene particles with a submicron-scale diameter on a glass plate. The ordered bumpy structure of the particle array surface was replicated on the deposited Al surface. Anodization was initiated at the concaves of the Al surface. Employment of the self-organized particle array to produce highly ordered anodic porous alumina with a submicron-scale channel structure was shown to be feasible.
Spatially selective electrochemical deposition of a metal (Ni) into the
ordered nanohole-array structure of anodic porous alumina was performed
using a microelectrode. A patterned deposit consisting of fine Ni cylinders
of 70 nm diameter was obtained in the hole-array structure with spatial
resolution on the order of tens of micrometers, and its size was in good
agreement with that of the microelectrode used as a tip.
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