We report recent results on the performance of FLASH (Free Electron Laser in Hamburg) operating at a wavelength of 13.7 nm where unprecedented peak and average powers for a coherent EUV radiation source have been measured. In the saturation regime the peak energy approached 170 µJ for individual pulses while the average energy per pulse reached 70 µJ. The pulse duration was in the region of 10 femtoseconds and peak

Many scientific disciplines ranging from physics, chemistry and biology to material sciences, geophysics and medical diagnostics need a powerful X-ray source with pulse