CH3 radical densities in electron cyclotron resonance (ECR) discharge methanol ( CH3OH), methanol diluted with hydrogen gas ( CH3OH/H2) and methane ( CH4) plasmas were measured for the first time using infrared diode laser absorption spectroscopy (IRLAS). CH3 radical densities in the CH3OH and CH3OH/H2 plasmas were estimated to be of the order of 1011 cm-3 under the conditions of total pressure of 1.3 Pa and microwave power of 50-800 W.
On the other hand, CH3 radical density in the CH4 plasma was estimated to be less than 1010 cm-3. Moreover, the production and loss processes of CH3 radical in the CH3OH plasma were discussed on the basis of the results of emission intensity of Ar*, the absorption ratio of CH3OH molecule and the decay curve analysis of CH3 radical after termination of the discharge.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.