Here we report on the production and tomography of genuinely entangled Greenberger-Horne-Zeilinger states with up to ten qubits connecting to a bus resonator in a superconducting circuit, where the resonator-mediated qubit-qubit interactions are used to controllably entangle multiple qubits and to operate on different pairs of qubits in parallel. The resulting 10-qubit density matrix is probed by quantum state tomography, with a fidelity of 0.668±0.025. Our results demonstrate the largest entanglement created so far in solid-state architectures and pave the way to large-scale quantum computation.

We report on deterministic generation of 18-qubit genuinely entangled Greenberger-Horne-Zeilinger (GHZ) state and multi-component atomic Schrödinger cat states of up to 20 qubits on a quantum processor, which features 20 superconducting qubits interconnected by a bus resonator. By engineering a one-axis twisting Hamiltonian enabled by the resonator-mediated interactions, the system of qubits initialized coherently evolves to an over-squeezed, non-Gaussian regime, where atomic Schrödinger cat states, i.e., superpositions of atomic coherent states including GHZ state, appear at specific time intervals in excellent agreement with theory. With high controllability, we are able to take snapshots of the dynamics by plotting quasidistribution Q-functions of the 20qubit atomic cat states, and globally characterize the 18-qubit GHZ state which yields a fidelity of 0.525 ± 0.005 confirming genuine eighteen-partite entanglement. Our results demonstrate the largest entanglement controllably created so far in solid state architectures, and the process of generating and detecting multipartite entanglement may promise applications in practical quantum metrology, quantum information processing and quantum computation.