We report the design, fabrication, and demonstration of antiresonant reflecting optical (ARROW) waveguides with hollow cores. We describe the design principles to achieve low waveguide loss in both transverse and lateral directions. A novel fabrication process using silicon dioxide and silicon nitride layers as well as sacrificial polyimide core layers was developed. Optical characterization of 3.5mum thick waveguides with air cores was carried out. We demonstrate single-mode propagation through these hollow ARROW waveguides with propagation loss as low as 6.5cm-1 and mode cross sections down to 6.7mum2. Applications of these waveguides to sensing and quantum communication are discussed.
We report the design, fabrication, and demonstration of single-mode integrated optical waveguides with liquid cores. The principle of the device is based on antiresonant reflecting optical (ARROW) waveguides with hollow cores. We describe design principles for waveguide loss optimization down to 0.1/ cm. Using a fabrication process based on conventional silicon microfabrication and sacrificial core layers, waveguides of varying widths and lengths with volumes covering the pico-to nanoliter range were fabricated. We observe confined mode propagation, measure waveguide losses of 2.4/ cm, and demonstrate that the waveguides possess tailorable wavelength selectivity. The potential for highly integrated, sensitive devices based on these properties of the ARROW waveguides is discussed.
We present a fully planar integrated optical approach to single-molecule detection based on microfabricated planar networks of intersecting solid and liquid-core waveguides. We study fluorescence from dye molecules in liquid-core antiresonant reflecting optical waveguides, and demonstrate subpicoliter excitation volumes, parallel excitation through multiple pump waveguides, and single-molecule detection sensitivity. Integrated silicon photonics combined with single-molecule detection in solution create a compact, robust, and sensitive platform that has applications in numerous fields ranging from atomic physics to the life sciences.
We present the characterization of the optical properties of integrated antiresonant reflecting optical (ARROW) waveguides with arch-shaped liquid cores. Optical mode shapes and coupling, waveguide loss, and polarization dependence are investigated. Waveguide loss as low as 0.26/cm with near-single-mode coupling and mode areas as small as 4.5microm2 are demonstrated. A detailed comparison to ARROW waveguides with rectangular cores is presented, and shows that arch-shaped cores are superior for many applications.
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