Describe the purpose With the continuous development of domestic high-tech semiconductor technology, the process components and line width have gradually entered the 32-nanometer generation. For this high-end process technology, the airborne molecular contaminant has been the one of the key factors that affects the process yield. The airborne molecular contaminants would induce chemical reaction (acid-base reactions, redox reactions) and the product components would be adsorbed or deposited on the wafer surface and result in wafer defects or process component of the lower reliability. Therefore semiconductor AMC issues have reached attentions, particularly by the high-end wafer fab.
In Taiwan, due to improved domestic living standards, power consumption due to residential and industrial air conditioning systems has risen rapidly, resulting in peak power shortages. During the summer months, air conditioning power consumption takes up over 45% of the total power consumption. Therefore, energy-saving designs for air conditioning systems could be improved, energy-saving could be achieved.The heat balance analysis of the refrigerant system in a water chiller unit is shown in Eq. 1. The evaporator of the water chiller unit provides the cold energy by way of refrigeration according to the air conditioning load, while the condenser must reduce the temperature and dissipate the heat of the air conditioning heat load and the compression by circulating the cooling water to the cooling tower. Figure 1 analysis of water piping systems in a water chiller unit. The heat balance analysis is shown as:The characteristic curves of the pump/fan similarity laws are shown in Table 1. Theoretically, the power consumption of the pump will be in a cubic proportion to the rotating speed. The power consumption will be 100% when the pump is operated at 100% of a full load. When the pump load is reduced to 80%, the operating curve moves with a reduced power consumption of 51.2%. Multi-core concept implementationIt achieves energy-saving by simply controlling the appropriate amount of chilled water and cooling water. Figure 2 shows the energy consumption analysis on the operation of the water chiller unit and pump. The energy-saving model refers to the operating point of the water chiller unit with a lower consumption amount (such as point A in Figure 2) and the operating point with an appropriate consumption amount (point B), where the refrigerating machine could operate with very low energy consumption. This study developed an innovative energy-saving model by adding frequency converters to the primary chilled water pump (CHP), the cooling water pump (CWP), and the cooling tower fan (C/T Fan) to optimize the energy-saving analysis and actual operating benefit from the water side. This study to look for a new energy-saving operating model that could maximize the energy-saving benefit, thus a 7~10% energy-saving benefit could be achieved in terms of the total power consumption. Figure 3 Optimum energy-saving analysis results of each system of the Water-side, and Figure 4 shows the general curves of the optimum energy-saving operation. In the water-side optimization, the energy saving benefit would be calculated, measured and verified, and the optimum energy-saving analysis results of each system would be verified by the actual electric meter price, to find the energy-saving effect. Figure 5 shows the accumulated annul energy-saving cost of the water-side optimization, which amounted to NT$11,455K per year. Table 2 is the verification table of the energy-saving operating benefit of the water-side optimization, among which the energy-saving optimization improvement of the cooling water pump (CWP) amounted to NT$5,745K. The...
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