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a b s t r a c tNitrides of high-entropy alloys (TiHfZrNbVTa)N were fabricated using cathodic-vacuum-arc-vapordeposition method. Morphology and topology of the surface of the coatings, roughness, elemental and phase composition, microstructure and mechanical properties were investigated. Dependence of deposition parameters on surface morphology and elemental composition was demonstrated. Influence of the heavy negative charged Au À ions implantation on phase structure, microstructure and hardness of nitride (TiHfZrNbVTa)N coatings was investigated.

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